EddyCus TF map Brochure

EddyCus® TF map Layer and Surface Characterization The local conductivity of thin-films, surface layers and multi-layer systems obtain various information on properties, effects and defects. The EddyCus® TF map is a system for fast mapping of layer homogeneity, conductivity effects and defects as well as sheet resistance or thickness of various conductive material systems. The system allows further a fast, user-friendly impedance spectroscopy for high spatial resolution mapping of resistive and dielectric properties. There are sensors sets with different sensitivities and spatial resolutions customizes for different material systems available. Further many effects and defects that affect the local conductivity can be detected. The detectability of effects, hidden structures and defects (cracks, holes, impurities) depends on it’s conductivity contrast. The systems come with pre-configured parameter sets for different testing tasks. Hence users can obtain quickly mapping results without specific knowledge on the technology. SURAGUS GmbH Maria-Reiche-Str. 1 01109 Dresden Germany E-Mail: info@suragus.com Phone: +49 (0) 351 273 598 01 Fax: +49 (0) 351 329 920 58 www.suragus.com Testing of conducive layers. SURAGUS GmbH | Maria-Reiche-Str. 1 | D-01109 Dresden | Germany | Phone +49 351 273 598 - 01 | Fax + 49 351 329 920 - 58 | info@suragus.com | www.suragus.com DATA SHEET EddyCus® TF map - Layer and Surface Characterization PERFORMANCE & SETUP EddyCus® TF map 4040 Frequency range 100kHz – 10 / 25 / 60 MHz Scanning frequencies 1 – 4 per run Sample rate 3,000 samples per second Measurement mode Measurement in 1 mm distance Substrate size 400 x 400 mm Scanning area 340 x 340 mm Scanning Speed 200 mm /s Scanning pitch 0,025 – 2,5 mm Eddy Current Sensors Different local resolution dedicated to different application (e.g. sheet resistance from 0.01 to 10 Ohm/sq) Video camera various specifications ? Contact-free ? Real-time display of results ? Measurement speed up to 200 mm/s ? Variable penetration depth for multi layer analysis ? 10 kHz to 60 MHz ? Up to 256 frequencies for evaluation processes ? Measurement time for 120 x 120 mm² @ scan resolution 0.5 x 0.5 mm² for single sensor configuration: 6 minutes ? Evaluation with color coding and extensive filtering capabilities ? Data archiving ? Sensor set for defect detection (cracks, impurities) ? Sensor set for sheet resistance mapping with different spatial resolutions and sensitivities ? Vacuum table for fixing flexible substrates ? EddyCus® TF map is available in various sizes (2020/4040/6060) ? Desktop device for laboratory use ? Stand-alone testing device for industrial purpose CHARACTERISTICS SETUP OPTIONAL FEATURES EddyCus® TF map 4040 EC Scan for defect analysis EddyCus® TF map 6060 (standalone)