Electrodeless Z-Pinch - Model EQ-10HP - High Power EUV Light Source 20 Watt - Datasheet

The EQ-10HP is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10HP EUV source is uniquely suited for metrology and research applications. The EQ-10 series sources have become the workhorse EUV sources for the EUV community, through their proven reliability, ease of use, and low operating cost.