EQ-10 - Compact, Reliable EUV Light Source - Brochure

The EQ-10 is a compact, easy-to-use, reliable, and cost-effective light source, based on Energetiq’s proven Electrodeless Z-Pinch technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications. The EQ-10 has become the workhorse EUV source for the EUV community, through its proven reliability, ease of use, and low operating cost.