Gas Mass Flow Meters & Controllers EL-FLOW Series

> IntroductionBronkhorst High-Tech B.V., the European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has more than 25 years experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst High-Tech offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial and hazardous areas, in such diverse applications as semiconductor and analytical installations, to name but two.> EL-FLOW® series for Laboratory and InstrumentationEL-FLOW® series Mass Flow Meters and Controllers for gas applications have a housing designed for laboratory and clean processing conditions. The instruments are truly unique in their capability to measure and control flow ranges between 0,014…0,7 mln/min and 8…1670 ln/min with pressure rating between vacuum and 400 bar – all in one range of instruments. This versatility in flow ranges and in operating conditions has ensured that the EL-FLOW® series remains our most popular and field proven of instruments.> State of the art digital designTodays EL-FLOW® series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling times t98 down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The latest EL-FLOW® design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For more information see our ‘MASS-FLOWSelect’ leaflet.In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an integrated interface board provides DeviceNetTM, PROFIBUS-DP®, Modbus, EtherCAT® or FLOW-BUS protocols. The latter is a fieldbus based RS485, specifically designed by Bronkhorst High-Tech for their mass flow metering and control solutions, and with which the company has many years of experience with digital communication.> Mass Flow Controllers for every applicationThe control valve can be furnished as integral part of an EL-FLOW® MFC, or as separate component. It is a proportional, electro- magnetic control valve with extremely fast and smooth control characteristics. With reference to the specific field of application there are different series of control valves. There is a standard direct acting valve for common applications, a pilot operated valve for high flow rates, the so-called Vary-P valve that can cope with 6 up to 400 bar ?P and a bellows valve for applications with very low differential pressure.> General EL-FLOW® featuresu fast response, excellent repeatabilityu high accuracyu virtually pressure and temperature independentu pressure ratings up to 400 baru optional metal sealed and downported constructions> Digital featuresu DeviceNetTM, Profibus-DP®, Modbus, EtherCAT® or FLOW-BUS slave; RS232 interfaceu optional Multi Gas / Multi Range functionality up to 10 baru storage of max. 8 calibration curvesu alarm and counter functionsu control characteristics user-configurableEL-FLOW®Digital Thermal Mass Flow Meters and Controllers for Gases> Technical specificationsMeasurement / control system Accuracy (incl. linearity) : standard: ±0,5% Rd plus ±0,1%FS (based on actual calibration) (±1% FS for ranges 3...5 mln/min; ±2% FS for ranges < 3 mln/min)Turndown : 1 : 50 (in digital mode up to 1:187,5)Repeatability : < 0,2% Rd Settling time (controller) : standard: 1…2 seconds option: down to 500 msecControl stability : < ±0,1% FS (typical for 1 ln/min N2)Operating temperature : -10…+70°CTemperature sensitivity : zero: < 0,05% FS/°C; span: < 0,05% Rd/°CPressure sensitivity : 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2Leak integrity, outboard : tested < 2 x 10-9 mbar l/s HeAttitude sensitivity : max. error at 90° off horizontal 0,2% at 1 bar, typical N2 Warm-up time : 30 min. for optimum accuracy 2 min. for accuracy ± 2% FSMechanical parts Material (wetted parts) : stainless steel 316L or comparableProcess connections : compression type or face seal couplingsSeals : standard: Viton; options: EPDM, Kalrez (FFKM)Ingress protection (housing) : IP40Electrical properties Power supply : +15…24 VdcPower consumption : meter: 70 mA; controller: max. 320 mA; add 50 mA for Profibus, if applicableAnalog output/command : 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)Digital communication : standard: RS232 options: Profibus-DP®, DeviceNetTM, EtherCAT®, Modbus, FLOW-BUS Electrical connection Analog/RS232 : 9-pin D-connector (male);Profibus-DP® : bus: 9-pin D-connector (female); power: 9-pin D-connector (male);DeviceNetTM : 5-pin M12-connector (male);EtherCAT® : 2 x RJ45 modular jack (in/out)Modbus-RTU/FLOW-BUS : RJ45 modular jackTechnical specifications and dimensions subject to change without notice. > Models and flow ranges (based on Air)Mass Flow Meters (MFM); PN100 (pressure rating 100 bar)Model min. flow max. flowF-110C 0,014…0,7 mln/min 0,06…9 mln/minF-111B 0,16…8 mln/min 0,16…25 ln/minF-111AC 0,4…20 ln/min 0,6…100 ln/minF-112AC 0,8…40 ln/min 1,4…250 ln/minF-113AC 4…200 ln/min 8…1670 ln/min For ranges of 200 or 400 bar rated MFMs see model number identification.Mass Flow Controllers (MFC); PN64 / PN100Model min. flow max. flowF-200CV/F-210CV 1) 0,014…0,7 mln/min 0,06…9 mln/minF-201CV/F-211CV 1) 0,16…8 mln/min 0,16…25 ln/minF-201AV/F-211AV 1) 0,4…20 ln/min 0,6…100 ln/minF-202AV/F-212AV 2) 0,8…40 ln/min 1,4…250 ln/minF-203AV/F-213AV 3) 4…200 ln/min 8…1670 ln/min1) Kv-max = 6,6 x 10-22) Kv-max = 0,43) Kv-max = 1,5MFCs for high-pressure / high-?P applications; PN400Model min. flow max. flowF-230M 0,2…10 mln/min 10…500 mln/minF-231M 10…500 mln/min 0,2…10 ln/minF-232M 0,2…10 ln/min 2…100 ln/min> Thermal mass flow measuring principleThe heart of the thermal mass flow meter/controller is the sensor, that consists of a stainless steel capillary tube with resistance thermometer elements. A part of the gas flows through this bypass sensor, and is warmed up by heating elements. Consequently the measured temperatures T1 and T2 drift apart. The temperature difference is directly proportional to mass flow through the sensor. In the main channel Bronkhorst High-Tech applies a patented laminar flow element consisting of a stack of stainless steel discs with precision-etched flow channels. Thanks to the perfect flow-split the sensor output is proportional to the total mass flow rate. Temperature profilewithout flowTemperature profilewith flowAmbient temperatureTurbulence filterFlowMeasured ?TMedium temperatureHeater 1 andTemperaturemeasurement 1Heater 2 andTemperaturemeasurement 2Sensor tubeLaminar flow element?T = k.Cp.Øm ?T = T2-T1 in Kelvin Cp = specific heat Øm = mass flowF-111B Mass Flow Meter> DimensionsMass Flow MeterDimensions in mm.Mass Flow ControllerDimensions in mm.> Fields of applicationThe EL-FLOW® series have been successfully applied in a wide variety of both OEM and laboratory applications in the following markets (typically):u Semiconductor processingu Analysis and environmental measurementsu Burner controlu Vacuum technologyu Surface treatment installationsu Process control in food, pharmaceutical and (petro-) chemical industriesTo give an impression of the many varied applications, we hereby sketch some basic examples. In reality, these applications are commonly far more complex and with far more variations and adaptations.> Burner controlBurner control using Mass Flow Controllers brings many advan-tages compared to conventional systems, where flow is adjusted through needle valves. When burner orifices get clogged or when gas supply pressure varies, an MFC will automatically adapt to the changed conditions. For the control of relatively large flows with low differential pressure, which is typical for natural gas or CH4, Bronkhorst High-Tech offers mass flow meters with separate pressure compensated bellows valves.> Making gas mixturesMFC’s are often used to make precise and stable mixtures of two or more gases. A Bronkhorst PS/Readout system can be applied to maintain the ratio of mixed gases by operating in master-slave mode. In the example above, the flow range of gas 1 is much smaller than the other. For this purpose Bronkhorst High-Tech developed a gas mixer, to guarantee a homogeneous gas mixture. > Feeding of reactorsFlow control is often combined with the control of reactor pres-sure, using an EL-PRESS back pressure controller, or as depicted, an EL-PRESS Pressure Meter with integrated PI-controller. Typical applications: high pressure hydrogenation systems and autoclave processes using a 400 bar rated Mass Flow Controller with Vary-P control valve.CHA KBCHA KBModel A B C H K Weight (kg)F-110C (1/8” OD) 47 98 47 111 25 0,4F-111B (1/4” OD) 69 126 47 111 25 0,5F-111AC (1/4” OD) 69 126 47 123 26 0,6F-112AC (1/2” OD) 65 130 47 139 59 1,3F-113AC (1/2” OD) 112 179 47 153 74 3,0Model A B C H K Weight (kg)F-200CV/F-210CV (1/8” OD) 77 128 47 111 25 0,6 F-201CV/F-211CV (1/4” OD) 77 134 47 111 25 0,6F-201AV/F-211CV (1/4” OD) 78 135 47 123 26 0,7F-202AV/F-212AV (1/2” OD) 112 169 47 139 59 2,1F-203AV/F-213AV (1/2” OD) 171 238 47 153 74 4,9F-230M/F-231M/F-232M (1/4” OD) 115 172 47 163 69 3,4Gas 2Gas mixerGas mixtureGas 1Pressure Meter withintegrated PI-controllerAutoclave withPmax 400 barProductReaction gas Base 0 Valve only 1 Meter 2 Controller Pressure rating 0 64 bar 1 100 bar 2 200 bar 3 400 bar Ranges for PN64/PN100 Flow Meters/Controllers 0C/0CV 0…0,7 / 0…9 mln/min 1B/1CV 0…8 / 0…25000 mln/min 1AC/1AV 0…20 / 0…100 ln/min 2AC/2AV 0…40 / 0…250 ln /min 3AC/3AV 0…200 / 0…1670 ln/min for PN200/PN400 Flow Meters 0M 0…10 / 0…15 mln/min 1M 0…15 / 0…20000 mln/min 2M 0…10 / 0…250 ln/min 3M 0…200 / 0…1250 ln/min for PN400 Flow Controllers 0M 0…10 / 0…500 mln/min 1M 0…0,5 / 0…10 ln/min 2M 0…10 / 0…100 ln/min Nominal range Factory selected Communication (I/O) A RS232 + analog (n/c control) B RS232 + analog (n/o control) D RS232 + DeviceNetTM (n/c control) E RS232 + DeviceNetTM (n/o control) M RS232 + Modbus (n/c control) N RS232 + Modbus (n/o control) P RS232 + Profibus-DP® (n/c control) Q RS232 + Profibus-DP® (n/o control) R RS232 + FLOW-BUS (n/c control) S RS232 + FLOW-BUS (n/o control) T RS232 + EtherCAT® (n/c control) U RS232 + EtherCAT® (n/o control) Analog output A 0…5 Vdc B 0…10 Vdc F 0…20 mA sourcing G 4…20 mA sourcingSupply voltageD +15…24 Vdc Connections (in/out)1 1/8“ OD compression type2 1/4“ OD compression type3 6 mm OD compression type4 12 mm OD compression type5 1/2” OD compression type6 20 mm OD compression type8 1/4” Face seal male9 otherInternal sealsV Viton (factory standard)E EPDMK Kalrez (FFKM)> Model number identification F - N N NAA - NNN - A A A - NN - AF-112AC Mass Flow MeterF-231M Mass Flow Controller for high pressure applicationsF-203AV Mass Flow Controller for high flow applicationsNijverheidsstraat 1a, NL-7261 AK Ruurlo NetherlandsT +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.comE.ELL.1012.G©BHT2010-088