Hitachi SU8040 FE-SEM Datasheet- Brochure

Hitachi ultra high resolutionFE-SEM setting the standard forimage resolution and stage precisionNewly developed Regulus stage?1Automated cell counting work f low (option)Ultra high resolution from an FE-SEM requires ultra high stage performance. Hitachi’s new Regulus stage was developed to meet the demands for today’s applications requiring high magni?cation and a high precision stage. Smooth, jitter free, motion extends the capa-bility for high throughput observation and cell counting of repeated patterns in DRAM/SRAM products. New pattern recognition soft-ware (optional) helps to locate the target cell, eliminating the tedious and time consuming task of manually counting the cellsHigher image resolution at low landing voltageNewly developed Regulus stage?1Higher image resolution at low landing voltageStunning image performance is a result of Hitachi’s unique triple Everhart Thornley detectors design, super E?B energy ?lter and improved beam deceleration function. Now, detailed surface observation is possible without specimen damage or charging contrast.Located and observe the cell starting point? The cell counting function helps to locate the target cell with highaccuracy and speed util izing pattern recognition and Hitachi’s new Regulus stage.?Cell count assist software (option).Select the cellpattern? Start the cellcounting routine?(0.5) (0.7)Courtesy of Department of Chemistry, Graduate School of Pure and Applied Sciences, University of Tsukuba Dr. Toshiharu Teranishi?1 Regulus : REGULated Ultra StableSample : Single crystal l ine octahedral gold nanoparticleLanding voltage : 1.0 kVSE +?BSE image (Upper detector)Sample : Li ion battery (Surface of negative electrode)Landing voltage : 100 VLeft : Upper imageRight : Top imageMag : 20 kx?imageMag : 300 kx(Upper left) : 500 kx(Lower right)?All rights reserved.Hitachi UHR FE-SEMPrinted in Japan (H) HTD-E187 2010.9PCPC/AT compatible, OS : Windows???Monitor24.1" type or the equivalent LCD (display screen image : 1,920 ? 1,200)Chamberscope??Optional SoftwareCD-measurement??CD-measurement function for SEM Data Manager (for external PC)??Hi-Mouse (single keyboard, single mouse)??RS-232C Communication interface??DBC interface??Cell count assist software??Digital Image Resolution640 ? 480 pixels, 1,280 ? 960 pixels, 2,560 ? 1,920 pixels, 5,120 ? 3,840 pixelsSecondary Electron Image Resolution1.0 nm (Vacc 15 kV, WD=4 mm)??1.3 nm (landing voltage 1 kV, WD=1.5 mm)??DetectorSecondary electron detector (Top/Upper/Lower)Semiconductor type BSED??YAG BSED??Energy dispersive X-ray spectrometer??STEM detector (for BF-STEM)??BF-STEM aperture??DF-STEM holder??Faraday cup??Electrical Image Shift±12 µm (WD=8 mm)SE/BSE Signal Mixing FunctionSE/BSE Upper DetectorAnti-contaminationAnti-contamination trapMagnification Magnification on Photo??Low mag modeHigh mag mode20-2,000x100-800,000xMagnification on display??60-25,000x300-2,000,000xElectron OpticsElectron gunAccelerating voltageLanding voltageObjective lens apertureCold cathode field emission source0.5 kV to 30 kV(Standard mode)0.1 kV to 2.0 kV(Deceleration mode)Objective aperture(Heating type), 4 openings selectable from outside of vacuum Alignment memorized for each Acc voltageUtility RequirementTemperatureHumidityPower (SU8040)Power (W-5020Td)GroundingCooling waterCompressed air??N2 purge??15 to 25?less than 60%(RH) (non-condensing)AC100 V ±10%, 4kVA (Crimp contact for M5)AC100 V ±10%, 2kVA (Crimp contact for M6)??100 O or lessDedicated cooling water circulation system??350 to 500 kPa (RC1/4taper internal thread)??30 to 50 kPa (RC1/4taper internal thread)??Dimension & Weight?7Main unitDisplay unitOil rotary pumpAir compressorWeightW-5020Td??Width (mm)8401,000530420200400Depth (mm)9701,010240210180450Height (mm)1,7201,200240520160670Weight (kg)66720528164073Specimen Stage (Regulus Stage)Stage ControlTraverse rangeMax. sample size Stage repeatabilityXYZTR5-axis motor drive0 to 110 mm0 to 80 mm1.5 to 40 mm-5 to 70°360°150 mm dia. (Maximum)less than ±0.5 µm??? Based on the gap (point to point) method by using Hitachi standard sample for resolution measurement??? at 127 mm ? 95 mm (4" ? 5" Picture size)??? at 173 mm ? 129 mm (640 ? 480 pixels) at 345 mm ? 259 mm (1,280 ? 960 pixels)??? Option??? Windows is a registered trademark of U.S. Microsoft Corp. in U.S.A. and other countries.??? In case of connection from the installation site facilities.??? Weight does not include options