IonSys - Model 800 - Ion Beam Deposition System- Brochure

The IonSys 800 system is designed for industrial ion beam etching and deposition processes with maximum quality and productivity requirements. The combination of multi-layer etching and deposition in one tool is possible. The reliability, uptime and compatibility with clean room class 100 compliance with all the requirements for advanced production equipment in microelectronics and optics. The advanced IonSys 800 can also be configured as a cluster system and is equipped with an automatic handling robot that features a cassette load-lock.