IRGAS with SpectraStream Technology

Part of the IRGAS and SPGAS Product Family? SPGAS software with SpectraStream? CIC Photonics high performance line of gas cells with automated transfer mirror stage? ABB Bomem Line of Spectrometers? Reduces the effects of spectrometer drift. ? Reduces the effect of background moisture fluctuation.? Reduces the time response typically associated with FTIR (from minutes to seconds)? Provides high sensitivity detection of impurities (low ppb).? There is not risk of contaminating production gases.? Reduces the complexity of FTIR operation? True 24/7 turn-key operation.? The background spectra are collected while the IR Beam bypasses the gas cell.? The sample gas spectra are collected while the IR Beams travels through the gas cell.? The path of the IR beam is controlled by the gas cell’s automated mirror stage.? SpectraStream automates the collection of the sample and background spectra.? The background and sample spectra are collected staggered from each other.? The background and sample spectra are co-added in a running average fashion.Automated Mirror StageTypical Absorption Spectra BaselinesABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz Windows? The background spectrum does not contain the absorption information of the gas cell’s optical ports and mirror gold coatings? The resulting absorption baseline is far from being flat.? Since the background spectrum is collected constantly, the resulting absorption baseline is very stable over long period of time.? Resulting baseline is easy to incorporate as part of the quantification algorithm.ABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz Windows.005.01.015.02.025.03 4500 4000 3500 3000 Absorbance / Wavenumber (cm-1)Resulting Absorption Spectra Baseline after the original absorption baseline has been proportionally subtracted.ABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz Windows? Small amounts of moisture that are desorbed from the spectrometer internal walls into the IR beam path are rapidly compensated (within 30 seconds).? System becomes extremely easy to use. It does not require a highly trained technician to guaranty that the gas cell has been properly zeroed-out.? Detection of low ppb levels of moisture within only 24-48 hours of system initial purging.? Concentration estimations are reported at every scanned sample.? For every gas component to be analyzed, two estimated concentrations are reported at all times.? One estimation is calculated over the last absorption spectrum without any co-additions. (Fast Concentration Tracker - FTC)? The second is calculated over the last absorption spectrum with the number of co-additions specified by the user. (Concentration)? The FCT provides an early warning of fast changes within the concentration of the gases being analyzed, but the SE of the estimation is larger.? The concentration reading provides a more precise measurement of the actual concentration with a smaller SE.-1012345678916:50:00 16:55:00 17:00:00 17:05:00 17:10:00 17:15:00 17:20:00PPM(hh:mm:ss)Detection of Water in AmmoniaConcentration FCTABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz Windows-100010020030040050060070017:13:00 17:14:00 17:15:00 17:16:00 17:17:00 17:18:00 17:19:00 17:20:00 17:21:00 17:22:00 17:23:00 17:24:00ppb(hh:mm:ss)Detection of Water in Ammonia (Detail)Concentration FCTABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz Windows? Turn-key operation. No expert user required to verify that the gas cell has being properly zeroed-out.? 24/7 Continuous operation. The gas cell does not need to be zeroed-out. ? No Zeroing-Out manifold required? No accidental contamination of production gases by gas manifold failure.? Sample gas concentration and impurity level verification.? Gas Purifier performance verification.IRGAS System WithSpectraStreamProductionProduction Gas10 -5-0.6-0.4-0.2-0.00.20.40.60.81.01.21.41.6Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum from PNNL* DatabaseSiH2Cl2 100 sccm / H2 14 slm @ 80TorrSiH4 100 sccm / H2 14 slm @ 80Torr10% GeH4 1 slm / H2 14 slm @ 80TorrSi2H6 300 sccm / H2 14 slm @ 80Torr-0.005-0.0000.0050.0100.0150.020Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum from PNNL* Database-0.06-0.04-0.020.000.020.040.060.080.100.12Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum from PNNL* Database* Pacific Northwest National Laboratory0.0020.0040.0060.0080.0100.0120.0140.0160.0180.020Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum not available within PNNL* Database-0.0010-0.00050.00000.00050.00100.00150.00200.00250.00300.0035Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum from PNNL* Database1% SiCH6 300 sccm / H2 14 slm @ 80 Torr1% B2H6 300 sccm / H2 14 slm @ 80Torr0.00050.00100.00150.00200.00250.00300.00350.00400.00450.00500.00550.0060Absorbance4000 5000 Wavenumbers (cm-1)3000 Spectrum Collected with EPITORRSpectrum not available within PNNL* Database* Pacific Northwest National LaboratoryHCL Spectrum without MoistureHCL Spectrum with High Moisture0.0000.0050.0100.0150.0200.0250.0300.035Absorbance3000 4000 5000 Wavenumbers (cm-1)Spectrum Collected with EPITORRSpectrum from PNNL* Database* Pacific Northwest National Laboratory-0.0050.0000.0050.0100.0150.0200.025Absorbance4000 5000 Wavenumbers (cm-1)3000 MoistureProcess Chamber Moisture Analysis02004006008001000120014:0014:1014:2014:3014:4014:5015:0015:1015:2015:3015:4015:5016:0016:1016:2016:3016:4016:5017:0017:1017:2017:3017:4017:5018:0018:1018:2018:30Time (Hours)Moisture (ppb)H2O content in HCl is too high,sw itching f low to H2+HCl through purif ierFlow of H2+ High HCl Test of purif ier, sw itching f low to H2+HCl (new tank)+purif ierPurif ier needs to be replaced, sw itching f low back to H2Purif ier insuff icient,sw itching back to H2Flow of H2 idle 200 TorrFlow of H2 + HCl (new tank)Purifier was damaged by bad tank, Purifier change required 0200400600800100012000 50 100 150 200 250 300 350 400 450 500 550 600Moisture Concentration (PPB)Data PointsSet PointActualABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans9.6m Ranger and IR-Quartz WindowsComponent Formula LODs (ppm)Silane SiH4 0.2Carbon Monoxide CO 2.5Carbon Dioxide CO2 0.1Germane GeH4 0.1Moisture H2O 0.02Hydrogen Chloride HCl 0.09Hydrogen Fluoride HF 0.005Dichlorosilane SiH2Cl2 0.4Diborane B2H6 0.1ABB WorkIR using a InAs Detector2cm-1 Resolution, 32 Co-added scans6.0m 4Runner and IR-Quartz WindowsNote: Equal or better LOD’s areExpected with ABB’s MB3000 FTIRRack Mounted TransportableMulti-sampling pointPermeation ControlIRGAS Systemswww.irgas.comCIC Photonics, Inc.9000 Washington St. NEAlbuquerque, NM.Phone: (505) 343-9500Fax: (509) 479-2980E-mail: request@cicp.com