Manual Wafer Measurement Tools - MX Series Brochure

MX 203 SeriesMX 204 SeriesMX 203 S iMX 2x Type Thickness Flattness TTV Geometry Bow / Warp Stress / Sori MX 3014-TMX 3014MX 301 / 3012 Framed WafersMX Framed WafersMMX 608 / 6012Series Thickness P/N (Dotation)MX 604 SeriesMX 604-B MX 604-SMX 604-STMX 604MX 601 SeriesMX 6010 ThicknessM Semi Isolating MaterialMX Semi Isolating MaterialMMX 152MX 102 / 1012SeriesMX 202 Series Resistivity /Sheet Resistance P/N (Dotation)M Resistivity /Sheet Resistance P/N (Dotation)Mance)MX 6x Type Resistivity /Sheet ResistanceMX 3x Type ThicknessWafersMX 604 B X 604-S SemMa Material2 High ResolutionThickness Thickness Flattness TTV Geometry Bow / Warp Stress / Sori Resistivity /Sheet Resistance Waviness Roughness P/N (Dotation) Partially supportedCharacteristics Framed Wafers Semi Isolating MaterialSpecial Material PropertiesceMX 2012 / 2013Serieswww.eh-metrology.com???????????? ??????????????????????????? ???????????????? ? ? ? ?? ? ? ????????????????????MX 7018MX 7012MX 7x TypeMX High ResolutionThickness GeometryBow / Warp Waviness RoughnessMX 2018 SeriesMX 1x Type High ResolutionThickness Flattness TTVMX 1018BasicTool TypesPoster_BasicToolTypes_ly5.indd 1Poster_BasicToolTypes_ly5.indd 1 02.09.2009 16:39:37 Uhr02.09.2009 16:39:37 Uhr