Mass-Flo Series - Mass Flow Controller Brochure

WWW.MKSINST.COMWWW.MKSINST.COMType GE50AELASTOMER SEALED, DIGITAL MASS FLOW CONTROLLERThe GE50A is a general purpose, elastomer sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N2 equivalent. The GE50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The GE50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Included is a digital calibration that yields 1% of setpoint accuracy on the calibration gas. The GE50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GE50As include Modbus as an available secondary I/O.The GE50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations. The design of the GE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GE50A comes standard with Viton® seals along with options for Buna, Neoprene® or Kalrez® allowing for the device’s use with gases requiring one of these alternatives. The GE50A MFC is available with either a normally closed or a normally open valve.Features & Benefits• Patented thermal sensor design provides exceptional zero stability• Percent of setpoint accuracy (calibration gas) enables precise process control• Embedded user interface provides the ability to - Easily change device range and user gas reducing inventory requirements - Monitor device functionality and collect performance data in-situ• Compatible analog and digital (RS485, DeviceNet®, and Profibus®) I/O allow the GE50A to replace its 1179A counterparts• CE Mark and RoHS Compliance – meeting requirements for the European UnionFlow Measurement & ControlUS Patent No 5461913.PerformanceFull Scale Flow Ranges (N2 equivalent) 5 - 50000 sccmMaximum Inlet Pressure 150 psig (can not exceed pressure differential requirement across MFC)Normal Operating Pressure Differential (N2 F.S.) 10 to 5000 sccm; 10 to 40 psid (with atmospheric pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psidProof Pressure 1000 psigBurst Pressure 1500 psigControl Range 2% to 100% of F.S. (range on mech.)Typical Accuracy (with N2 calibration gas) ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S.Repeatability ± 0.3% of ReadingResolution 0.1% of Full ScaleTemperature Coefficients Zero < 0.05% of F.S./°C Span < 0.08% of Rdg./°CInlet Pressure Coefficient < 0.02% of Rdg./psiWarm-up Time < 30 min (to within 0.2% of F.S. of steady state performance)Typical Controller Settling Time < 750 msec., typical above 5% F.S. (per SEMI Guideline E-17-0600)Operating Temperature Range (Ambient) 10°C to 50°CStorage Humidity 0 to 95% Relative Humidity, non-condensingStorage Temperature -20° to 80°C (-4° to 149° F)MechanicalFittings (compatible with) Swagelok® 4 VCR® male, Swagelok VCO® male, 1/4'' Swagelok compression seal, Swagelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok, 6 mm Swagelok, 8 mm SwagelokLeak Integrity External (scc/sec He) < 1 x 10-09 Through closed valve Up to 10K valve <0.1% of FS at 40 psig to atmosphere 20K - 50K valve <1.0% of FS at 40 psig to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.)Wetted Materials Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, Nickel Seals and Valve Seat Viton, Buna-N, Neoprene, KalrezSurface Finish 16µ inch average Ra Weight less than 3 lbs (1.4kg)Electrical Analog I/O CE Compliant to EMC Directive 2004/108/ECInput Power Required +15 to +24 VDC @ (< 4 watts) Flow Input/Output Signal Voltage (0 to 5 VDC) 15 pin Type ''D'' male, 9 pin Type ''D'' male Current (4 to 20 mA) 15 pin Type ''D'' maleSpecifications (cont’d)Dimensional Drawing — DeviceNet and RS485 with VCR fittings* *(See manual for additional I/O and fitting types) Note: Unless specified, dimensions are nominal values in inches (mm referenced). Dimensional DrawingDigital I/O CE Compliant to EMC Directive 2004/108/ECDigital I/O DeviceNet™ RS-485 Profibus® Input Power +11 to +25 VDC per +15 to +24 VDC (< 4 watts) +15 to +24 VDC (< 4 watts) Required DeviceNet specification (< 4 watts)Connector 5 pin microconnnector (DeviceNet) 9 pin Type D male 9 pin Type D male (power) and 9 pin Type D female (comm.)Data Rate Switch/ 4 positions: 125, 250, 500K (Default), No switch No switch Selection PGM (programmable over the network) Set Data Rate via RS485 Set Data Rate via ProfibusData Rate Data Rate (User Selectable) Data Rate (User Selectable) Data Rate (User Selectable) 125 Kbps 9.6 Kbps 9.6 Kbps to 12 Mbps 250 Kbps 19.2 Kbps 500 Kbps 38.4 KbpsMAC ID 2 switches, 10 positions; 0,0 to 6,3 Set address over RS485 2 switches, 10 positions Switches/Addresses 1 to 254 Station Addresses 0,0 to 9,9 Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodesNetwork Topology Linear (trunkline/dropline) Master/slave Master/slave power and signal on same network cableVisual Communication LED network status (green/red) LED Comm (yellow) LED Comm (green/red) Indicators LED module status (green/red) LED Error (red) LED Error (green/red) GE50 - 4/14 © 2012 MKS Instruments, Inc. All rights reserved.MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Viton®, Neoprene®, and Kalrez® are registered trademarks of E.I. Dupont, Wilmington, DE. Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus International, Karlsruhe, Germany.Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810Tel: 978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web: www.mksinst.com60013V20502RGE50A* The Full Scale Flowrate is designated by a 3 digit number. The first two digits represent the significant digits of the FS flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example Flowrate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.Ordering InformationOrdering Code Example: GE50A013502R6V020 Code ConfigurationType MFC Mass Flow Controller GE50A GE50A Gas (Per Semi Standard E52-0703) For example: 013 = Nitrogen = N2 013 029 = Ammonia = NH3 029 110 = Sulfur Hexafluoride = SF6 110Flow Range Full Scale* 5 sccm 500 10 sccm 101 20 sccm 201 50 sccm 501 100 sccm 102 200 sccm 202 500 sccm 502 1000 sccm 103 2000 sccm 203 5000 sccm 503 10000 sccm 104 20000 sccm 204 30000 sccm 304 50000 sccm 504Fittings (compatible with) Swagelok 4 VCR male R Swagelok 4 VCO male G 1/4'' Swagelok S Swagelok 8 VCR male T 1/8'' Swagelok (for 1000 sccm N2 equivalent or below) A 1/2'' Swagelok K 6 mm Swagelok M 8 mm Swagelok EConnector DeviceNet™ 6 RS485 (uses 9 pin connector) 5 Profibus® 4 Analog 0 to 5 VDC (9 pin D connector) A Analog 0 to 5 VDC (15 pin D connector) B Analog 4 to 20 mA (15 pin D connector) H Seal Materials** Viton V Buna-N B Neoprene N Kalrez K Valve Type Normally Closed 0 Normally Open P Firmware Unless otherwise specified, MKS will ship firmware revision 20 current to date.