Model 102C/CE - Optical Edge Profile Comparators Brochure

The Model 102C Edge Profile Comparator is a precision instrument for verifying wafer edge shape and integrity before beginning the manufacturing process. The instrument magnifies the profile image 100 times for display on the built-in 12-inch monitor. Precision fixturing for wafers from 1-inch to 300 mm allows rotation of the wafer 360 degrees and refocusing as needed. By comparing the image with a template mounted to the monitor, wafers are compared against specifications such as SEMI M1 or M9. With the optional video processor, the image can be printed for hard-copy documentation. By creating a shadow-edge profile image, this qualitative, non-destructive inspection instrument helps to verify compliance to specifications, without sacrificing the wafer.