Model 2200 - Calibration Wafer Standards Full PSL Depositions Datasheet

The Full PSL Deposition Standard is a bare wafer deposited with polystyrene latex (PSL) spheres over the entire frontside surface. The spheres have a very narrow size distribution and are deposited with high spatial uniformity, which are ideal characteristics for calibrating and monitoring scanning surface inspection system (SSIS) tools used for measuring defects on wafer surfaces.

Full depositions are preferred over spot depositions for SSIS calibration because the areal density of deposited spheres is lower, thereby minimizing sizing artifacts due to coincidence effects. A spatially uniform deposit also allows the particle size response of the SSIS to be observed as a function of radial position on the wafer.