MU Series - Micro Dry Pump Brochure

e-catalog MU-e Ver2.1 08.06The world smallest and least power consumption.The pump can be integrated into any equipmenteasily.- Kashiyama ultimate space save design has realized the pumping speed of1660l/min with the small foot print 230 mm x 450 mm.- The MU series are perfect for load locks, clean exhaust for transfer rooms andlight process application of semiconductor manufacturing.MUMU Series / For Tool Mount /Micro Dry PumpMU100 MU3001,660 5,000NW5060 1001.5 0.5NW25MICRODRYPUMPMUSERIESMICRODRYPUMPMUSERIES2.2 2.2+2.20.7 0.9Specification TableModelSpecificationMaximum Pumping Speed (L/min)Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)Inlet FlangeOutlet FlangeWeight(Approx.) (kg)Power in normal operation (kW)Electric Power Capacity(kW)Atmospheric pressureKashiyama-USA, Inc.Pump Schematic (MU100)Pump Schematic (MU300)Kashiyama-USANote 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge SystemURL:www.kashiyama.com/us/mail address for inquiries:sales@kashiyama.come-catalog MU-e Ver2.1 08.06MUMICRODRYPUMPMUSERIESMICRODRYPUMPMUSERIES520 55019962.52211596.5401425150 1505040 402-M8 2-M885.5 25219 413202 202230N2 Control Valve279450109(99)(102) 89125264293354042194194Power S upply LE D(LE D1/green)R un LE D(LE D2/green)E rror Warning LE D(LE D3/orange)E rror Alarm LED(LE D4/red)Handheld controllerCableN2 pressure gaugeN2 R egulatorPower inputconnector(CN1)R emote controlconnector(CN2)Handheld controllerconnector(CN3)Cooling water inlet R c3/8(with self-seal coupler)Cooling water outlet R c3/8(with self-seal coupler)N2 Gas inlet(with Tube F itting 1/4 straight)Main switch(for case purge)R igid Caster(OD40*4)Adjuster(OD24*4)Outlet NW25Inlet NW50Box Duct (OD50)Lifting Bolt(M8*4)Main switchPower inputInlet NW50Outlet NW25N2 Gas inletR egulatorN2 pressure gaugeHandheld controllerconnector(CN1)R emote controlconnector(CN2)(with Tube F itting 1/4 straight)CableHandheld controllerconnector(CN3)230275450R igid Caster (OD40*4)6 25217 4142218564 27131Adjuster (OD24*4)Cooling water inlet R c1/4(with self-seal coupler)Cooling water outlet R c1/4(with self-seal coupler)22(115) 1158543190202818339033902-M62-M676Power S upply LE D(LE D1/green)R un LE D(LE D2/green)E rror Warning LE D(LE D3/orange)E rror Alarm LED(LE D4/red)Lifting Bracket(*2)after installing the pump)(R emoving the brackets is poss ible5266371360(29)(attached to MU100N)(attached to MU100N)8912526