Nanopositioning Piezoelectric Zsa-1000C - Data Sheet

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1mm vertical travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal roll and tilt as well as dynamic responsiveness for excellent position stability and control. In semiconductor industry applications, the stage has been implemented in closedloop control using DSM’s SA series servo amplifier and a high-resolution capacitive probe to provide 20 nm position stability and very stable velocity profiles over specified scan regions.