MSP Corporation is an instrument and equipment company creating products for scientific research and industrial applications. We are known world-wide for our expertise in micro- and nano-particles and their creative use in research and manufacturing. Our products are user friendly and designed as productivity enhancing tools for aerosol research, pharmaceutical inhaler testing, thin-film deposition in semiconductor device fabrication, contamination control, and life science applications. Contact us today to solve your own application challenges and connect to our world-wide distribution network. Get acquainted with our Micro Technologies, and Big Ideas.

Nanoparticles - now part of TSI, Inc.

MSP products and expertise help researchers and manufacturers analyze micro and nanoparticles with a variety of specialty instruments for:

Nanoparticle sampling,
Micro and nanoparticle counting,
Particle generators
Laser particle counting instruments
Wide Range Particle Spectrometer

Our instruments help certify results for systems requiring highly accurate measurements. The equipment is used for accurate measurements in industries utilizing nanoparticles for drug delivery devices as well as wafer standards in semiconductor manufacturing. When researchers and scientists have requirements for high levels of accuracy, then MSP’s equipment and expertise help set the gold standard.

Particle Measuring Systems - now part of TSI, Inc.

MSP’s aerosol instrument products include cascade impactors, virtual-impactor concentrators, personal PM samplers, micro-environmental PM Samplers, condensation particle counters, an asbestos fiber monitor, aerosol generators, electrical ionizers, differential mobility analyzers, laser particle counters and wide range particle spectrometers.

Pharmaceutical Inhaler Testing Equipment and Services

MSP is the home of the Next Generation Impactor™ (NGI™), a cascade impactor for testing Metered-Dose Inhalers, Dry-Powder Inhalers and other inhalable drug products. We also offer labor-saving, productivity-enhancing tools for recovering drug samples collected by a cascade impactor. We offer mensuration services for both the NGI and the Andersen Cascade Impactor and the full range of accessories for inhaler testing.

Semiconductor Metrology Products and Services

MSP’s semiconductor metrology products and services include:

Particle Deposition Systems to create particle size standards for calibrating wafer surface inspection tools
Contamination Control Products- cleanroom foggers, NIS-Traceable PSL and silica sphere wafers

Semiconductor Manufacturing Products

MSP’s semiconductor manufacturing products include:

Turbo Vaporizer product family uses droplet-vaporization, direct liquid injection vaporizer for liquid source vaporization and vapor delivery in thin film deposition by CVD, PECVD and ALD processes
Vapor-Process Gas (VPG) Filters for direct liquid injection ALD, CVD thin film deposition
Liquid flow controllers and Sensors for direct liquid injection ALD, CVD thin film deposition

NanoSilica Particle Size Standards Spec Sheet