NDIR-NF3 - Data Sheet

Senovol NDIR-NF3 sensor is designed using Non-dispersive Infrared (NDIR) technology for the detection of Nitrogen Trifluoride (NF3). NF3 is toxic and mainly used to remove silicon and silicon compounds during the manufacturing of semiconductor devices. It is a high-performance, industrialgrade NF3-specific sensor with minimized cross-sensitivities from other gases.