P9000 Datasheet

The P9000 Cluster System is a high-throughput, versatile wafer processingsystem that can be configured as a Coater, Developer, Vapor Prime, HPO, Chill Plate, etc. It can process a wide range of photoresist and photosensitive polymer applications. Its sophisticated system software, along with state-of-the-art hardware, allows the user to program hotplates at various bake temperatures, and prime, coat, and develop wafers in parallel. The system is also easily expandable to keep pace with business growth or process requirements.