Park - Model NX20 300mm - Automated Nanometrology Tool - Brochure

The Park NX20 300mm is the industry`s first large sample AFM that supports a full motorized traveling range of 300 mm x 300 mm. Designed for failure analysis and quality control laboratories, the new upgraded Park NX20 system can inspect an entire 300 mm wafer efficiently, without any need for cumbersome sample displacement. Despite the enlarged platform to support the 300 mm motorized XY stage,