Parker - VSO Series - Thermally Compensated Proportional Valve - Brochure

Miniature Proportional ValvesPhysical PropertiesVSO® Low FlowThermally Compensated Proportional ValveThe VSO® Low Flow valve provides enhanced flow control for applications where precise control flow control is required between 0 - 500 sccm. Like the VSO® miniature proportional valve, the VSO® Low Flow miniature proportional valve provides precise flow control of gas in proportion to input current. The valve can be controlled with either DC current or pulse width modulation along with closed loop feedback to deliver optimal system performance. Together with its ability to provide precise control over a wide range of media, the VSO® Low Flow miniature proportional valve is ideally suited for manufacturers of Gas Chromatography and Mass Spectrometry equipment. Valve Type: 2-Way Normally ClosedMedia: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & othersOperating Environment: 32 to 131°F (0 to 55°C)Storage Temperature: -40 to 158°F (-40 to 70°C)Length: 1.79 in (45.3 mm)Width: 0.63 in (15.9 mm)Height: 0.67 in (17.0 mm)Porting: Manifold mountWeight: 2.2 oz (63 grams)• Enables precise low flow (0 - 500 sccm) control for improved instrument accuracy• Thermally compensated to maintain precise flow over a wide range of media• Computer automated calibration and serialization for performance traceability• Cleaned for Oxygen and Analytical Service use• Proven performance tested to 10 million life cycles• RoHS compliantFeaturesVSO is a registered trademark of Parker Hannifin Corporation.Typical Applications• Gas Chromatography• Mass Spectrometry • Pressure & Flow Control• Mass Flow ControlPhysical PropertiesWetted MaterialsElectricalPower:2.0 Watts maximumVoltage: See Table 2Electrical Termination:18” (45.7 cm) Wire LeadsPerformance CharacteristicsLeak Rate: The leakage shall not exceed the following values:Internal 0.2 SCCM of He with a differential pressure of 1 psid, 25 psid and 150 psidExternal 0.016 SCCM of He at 150 psiPressure: 0 to 150 psi (10.34 bar) See Table 1Vacuum: 0-27 in Hg (0-686 mm Hg)Orifice Size: 0.003” (0.076 mm) Hysteresis: 7% of full scale current (Typical) 15% of full scale current (Max)Internal Volume: 0.031 in3 (0.508 cm3)Filtration: 5 Micron (Customer Supplied)Flow Direction: Inlet Port Port 2Outlet Port Port 1Oxygen and Analytically Clean: StandardBody: 360 HO2 BrassStem Base: 430 FR Stainless Steel and Brass 360 HTAll Others:FKM; 430 FR Stainless Steel; 300 Series Stainless SteelMiniature Proportional ValvesVSO® Low Flow Thermally Compensated Proportional Valve Table 1: Pressure and Flow Capabilities VSO® Low Flow Pressure vs Flow Curve00.500.400.45150 psi / 10.34 bar125 psi / 8.62 bar100 i / 6 89 b0.300.35slpm)100 psi / 6.89 bar75 psi / 5.17 bar50 psi / 3.45 bar0.200.25ow Rate (s25 psi / 1.72 bar0 100.15Flo0.050.100.000 10 20 30 40 50 60 70 80 90Current (mA)Typical Air Flow with 13.5 VDC CoilOrifice DiameterMaximum Operating Inlet PressureMaximum Operating Pressure Differential0.003 in (0.076 mm) 150 psig (10.34 bar) 150 psid (10.34 bar)0 1 2 3 4 5 6 7 8 9 10Pressure (bar)0 1 2 3 4 5 6 7 8 9 100 50.60.40.5slpm)0.3Rate (s0 10.2Flow 0.00.10 20 40 60 80 100 120 140 160Pressure (psi)Model L3 - 0.003” (0.076 mm) OrificeMiniature Proportional Valves1.53 [38.9]APPROX..305 [7.75].625 [15.88]2X #26 AWG.BLACK WIRES18 1/2" ± 1/2"[469.9 ± 12.7] LG.COIL TYPE: WIRE LEADSVSO® Low Flow Thermally Compensated Proportional ValveVSO® Low Flow Manifold Mount VSO® Low Flow Basic Valve DimensionsPneumatic InterfaceElectrical Interface1.785 [45.34].055 [1.40].500 [12.70].305 [7.75].67 [17.0].055 [1.40].305 [7.75].625 [15.88] MAX.2X Ø.123 ±.003[3.12 ±0.08] (I.D.)2X Ø.125 [Ø3.18].312 [7.92].156 [3.96].125 [3.18].27 [6.9].281 [7.14]PORT 2(INLET)PORT 1(OUTLET)UNITSIN. [mm.].500 [12.70]VSO Low Flow, Basic Valve DimensionsCoil Type: 18” Wire Lead Table 2: Electrical RequirementsMinimum Available Voltage (VDC)Nominal Coil Resistance @ 20?C (Ohms)Input Current for Full Flow (mA)6.5 47 1308.0 68 11512 136 8018 274 6024.0 547 43Miniature Proportional ValvesVSO® Low Flow Installation and UseTypical Valve Set-upValve Electrical ControlSuggested VSO® Low Flow Current Driver SchematicVSO® Low Flow Thermally Compensated Proportional ValveINLETOUTLETINPUT SIGNALVALVE DRIVER CIRCUITFLOW OR PRESSURESENSOR/METERPRESSUREREGULATORVSO® LOW FLOW VALVEVSO LOW FLOW CURRENT DRIVERBasic Control: The VSO® Low Flow valve can be controlled by either voltage or current; however, it is highly recommended that current control be employed to ensure the most repeatable valve flow performance.PWM Control: For PWM control, the signal applied to the valve should have a frequency between 5-12kHz. Optimum frequency will be application dependent.Minimum Available Voltage (VDC)Valve Drive Voltage (VDC)Nominal Coil Resistance @ 20?C (Ohms)Input Current for Full Flow (mA)R1 (Ohms)R2 (Ohms)6.5 8.5 47 130 4990 1028.0 10.0 68 115 4990 7312.0 14.0 136 80 5100 34.418.0 20.0 274 60 8560 28.724.0 26.0 547 43 8560 15.4Table 3: Selectable Resistor Values for a Low Current (1mA) LM358-Based Current DriverThis simple current driver circuit draws only 1 mA at the input control (0-5VDC) and provides control for any VSO® Low Flow configuration regardless of valve voltage or resistance. Table 3 (below) describes the recommended R1 and R2 resistor values based upon the full shut-off current.Miniature Proportional ValvesOrdering InformationSample Part ID 910 - 000200 - 001Description Series - Model Number: - Coil Voltage*Options VSO Low Flow, 0.003" (0.076 mm) Orifice 001: 6.5 VDC002: 8 VDC003: 12 VDC004: 18 VDC007: 24 VDC* Maximium voltage for continuous full flow, ambient temperture 55°CAccessories190-007024-002: O-ring, FKM, 0.114" ID x 0.070" Thick* * Not supplied with the valve. Used as a seal between the valve body and manifold.191-000115-010: Screw 4-40 x 5/8" Pan Head ** **Not supplied with the valve. Used to mount the valve to a manifold.VSO® Low Flow Thermally Compensated Proportional ValveFor more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidicsPPF-MPV-002/US February 2013.310 ±.005[7.87 ±0.13].250 ±.005[6.35 ±0.13].310 ±.005 [7.87 ±0.13].250 ±.005 [6.35 ±0.13].500 ±.010 [12.70 ±0.25]Ø.093 ±.005 [Ø2.36 ±0.13]#10-32 UNF-2B ? .150 [3.81]Ø.093 ±.005 [Ø2.36 ±0.13]#10-32 UNF-2B ? .150 [3.81].281 ±.005 [7.14 ±0.13].141 ±.005 [3.58 ±0.13].156 ±.005 [3.96 ±0.13].312 ±.005[7.92 ±0.13]2X Ø.136 ±.005 [Ø3.45 ±0.13]? Ø.240/.245 X ? .055/.060 [Ø6.01/6.22 X ? 1.40/1.52]2X #4-40 UNC-2BX ? .260 [6.60].170 ±.005[4.32 ±0.13].620 ±.010 [15.75 ±0.25].620 ±.010 [15.75 ±0.25].310 ±.005 [7.87 ±0.13]Manifold & O-Ring Dimensions & Design Not shipped with valves.NOTE: In order to provide the best possible solution for your application, please provide the following requirements when contacting Applications Engineering: • Media, Inlet & Outlet Pressures • Minimum Required Flow Rate • System Supply Voltage • Media & Ambient Temperature Range Please click on the Order On-line button (or go to www.parker.com/precisionfluidics/lowflow) to configure your VSO® Low Flow Thermally Compensated Proportional Valve. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002160-002 and Drawing #890-003022-022.ORDERON-LINEO-Ring (Manifold Seal) Dimensions190-007024-002 (2 required for each valve)Accessories Screw 4-40 x 5/8” Pan Head, Phillips191-000115-010 (2 required for each valve) I.D. "W" I.D. = Ø.114 ±.005 [Ø2.90 ±0.13] W = .070 ±.003 [1.78 ±0.08]O.D. = Ø.254 [Ø6.45] REFERENCEMiniature Proportional ValvesNOTES