Pyro - Model 400 - Metrology System Brochure

LayTec offers an ultimate solution for GaN-based LED production: the Pyro 400 metrology system. It  provides precise real surface temperature measurements during epitaxial growth of GaN on sapphire or SiC, and enables direct growth control of InGaN multiple quantum well (MQW) layers. While conventional pyrometers measure pocket temperature instead of wafer temperature, Pyro 400 provides both ultraviolet (UV) pyrometry for direct GaN surface temperature control and, additionally, infrared (IR) pyrometry for pocket temperature.