Quiet Island - Active Vibration Cancellation System Brochure

Semiconductor manufacturing factories (fabs) incorporate a system of raised false floors to accommodate complex facilities requirements (plumbing, electrical cables, gas piping, etc.) and to maintain strict cleanliness standards. Such floors present a challenge to the installation of extremely vibration-sensitive production, inspection, and metrology equipment. The raised floors cannot provide the necessary quiet vibration environment for such tools. TMC`s Quiet Island® is an innovative solution that replaces a section of the raised floor area with a "Quiet Island" anchored to the sub-floor below. The Quiet Island consists of a special platform combined with a dedicated support structure, the nature of which depends upon the application.