SDL Series - High Throughput Dry Pump Brochure

e-catalog SDL-e Ver2.1 08.06- Maximized the pumping speed in the atmospheric side to achieve higherthroughput.- The combination with large booster pump allows higher pumping speed up to55,000L/min.- Applicable for clean processes.SDLSDL SeriesHigh Throughput Dry PumpHIGHTHROUGHPUTDRYPUMPSDLSERIESHIGHTHROUGHPUTDRYPUMPSDLSERIESHigher pumping speed.Support larger diameter wafer, larger FPD substrate and Solarapplications.Higher pumping speed minimizes the tact time for large load lockchamber.Specification TableModelSpecificationMaximum Pumping Speed (L/min)(Upper 50Hz / Lower 60Hz)Ultimate Pressure (Pa) 50/60HzMaximum Inlet Pressure (Pa)Inlet FlangeOutlet FlangeWeight(Approx.) (kg)Electric Power SupplyPower in normal operation (kW)Electric Power Capacity (kVA)Cooling Water SupplyPurge N2 Gas Supply5L/min and over0-50SLMAtmospheric pressure3 phase AC200 50/60Hz AC220V 60Hz6L/min and over3 phase AC200-220V 50/60HzSD220L SDL25K SDL40K3,10025,0003,7004/3 0.5NW50 NW100 NW160450 620 9105.08.3NW40SDL60K40,000 55,0006.917.07.023.67.428.1NW50750Kashiyama-USA, Inc.Pumping Curve(SP)Pump Schematicse-catalog SDL-e Ver2.1 08.06SDLW2SD220LModel960L1606 72H1 H2626630H3 H4402L341L2524 45W1217 62W3 W474 57a b152 130c d14315e fDimension:mmEMORemote control connectorPower connectorDuct OD50Inlet NW50Outlet NW40CasterCooling water outlet Rc3/8N2 pressure gaugeCooling water inlet Rc3/8with self-seal couplerN2 supply portwith PIPE-FITTING 1/4 straightELCBwith self-seal couplerRegulator170*80*30Control panelCommunication cable(L=2000mm)(46)L3H2L2L1H3(Inlet)H4(Outlet)H1ea bdcf85W2W1W4W3*1Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System101001000100001000000.1 1 10 100 1000 10000 100000Pressure(Pa)PumpingSpeed(L/minSD220L(50Hz)SD220L(60Hz)SDL25KSDL40KSDL60KPressure (Torr)1001010.10.010.001 1000SD220L???Inlet NW1001000Inlet111027Outlet633CasterOutlet NW50Duct port OD5060355155Control panelELCB1050N2 supply portCooling water Inlet Rc1/2Cooling water OutletRc1/2508018213(44)Pipe fitting 1/4with self-seal coupler170*80*3040EMORegulatorN2 pressure gaugeN2 control valveRemote control connectorPower connector520260 140with self-seal coupler30Pipe fitting 1/4with self-seal couplerCooling water Outlet Rc1/2Cooling water Inlet Rc1/21250Inlet13151200Caster65Outlet633Outlet NW50(72)424Duct port OD50141Inlet NW16060Remote control connectorControl panelELCBEMOPower connector30100 7030N2 supply portN2 pressure gaugeN2 control valve207Regulator170700170*80*30180with self-seal couplerEMOCooling water Inlet Rc1/2with self-seal couplerControl panel1660Inlet17201180Outlet633CasterOutlet NW50Duct port OD50355255Inlet NW16060EMORemote control connectorPower connectorELCBPipe fitting 1/4N2 supply port80182N2 control valveN2 pressure gaugeRegulator170*80*30375750140Cooling water Outlet Rc1/2with self-seal coupler1330805040SDL25KSDL40K SDL60KURL:www.kashiyama.com/us/mail address for inquiries:sales@kashiyama.comKashiyama-USA