Voltaix LLC
- Home
- Companies & Suppliers
- Voltaix LLC
- Downloads
- Silane Datasheet
Silane Datasheet
A pyrophoric, colorless gas. Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.
A pyrophoric, colorless gas. Silane is used for CVD of epitaxial silicon and silicon alloys and PECVD of amorphous silicon and silicon based dielectrics.