STIL - Non-contact Defects Inspection System - Brochure

Vision systems have a dual role: to provide a good quality image of the sample surface at the desired magnification and to process the image in order to detect and analyze certain predefined features or textures. Although processing units are becoming more and more powerful, the main limitation of current vision systems is their very small depth of field (a few tens of µm or less, depending on the magnification and numerical aperture).