SU3500_E_Low_0712- Brochure

S CANN INGE L ECTRONM ICROSCOPESCANN INGE L ECTRONM ICROSCOPEHTD-E203?2012.7A New Dimension in Image QualityS CANN INGE L ECTRONM ICROSCOPENovel and innovative electron optics and image display rendering engineImage observation and analysis withouttraditional specimen preparation techniquesDelegation technology affords easy operation and increased throughput efficiencyEnhanced navigation via new analytical chamber and automated stage functions??P3??P5??P7??P11UnUUnUUnUnUUUnp ededdedddededdddedddeddeedmmmmmmmImaaagaggaggge e QuQuQ ala tttityyyyyyyImImImmImImI aagagagagggeee QuQuQualalalittitititityyyyyyyya iUnparalleledImage QualityRRRoo ssssssssssssssssssssss&&&&& VVVV ttttttyyyyyRobustness& VersatilityScreen shows simulated imageIInIIOOOpOOOO nnnIntuitiveOperationAAutoo atedd SppSppppecec enneen S StagegegMulti-Functional,Automated Specimen StageOperation GUI for SU3500Upper left?Secondary Electron (SE) image, Upper right?Backscattered Electron (BSE) Compositional imageLeft below?Backscattered Electron Topographic image, Right below?SE and BSE mixed image1 27nm SE Image Resolution at 3kV, 10nm BSE Image Resolution at 5kVHigh imaging performance at low accelerating voltageThe emission current extracted from a tungsten filament is proportionally reduced as the accelerating voltage is decreased; therefore, the image signal-to-noise ratio is typically compromised. The SU3500 employs an improved gun bias system that optimizes the emission current at several acceleration voltage levels for enhanced brightness, but also optimizes the emission across the entire 300-30kV range. The result is best-in-class image sharpness (S/N) at low accelerating voltages. New image display engine allows quick and easy focus and astigmatism correctionThe SU3500 incorporates a revolutionary Image Signal Processing function that optimizes the image quality on the fly, makes it easier for focus adjustment and astigmatism correction during real time observation.SU3500Previous model20sec Scan,Accelerating Voltage 1.5kV Magnification: x110 Sample: CopepodWith Ionic liquidLive image at fast scanSample : Printed circuit boardSample : Broken section of metal clipHighly efficient Automatic Focus Control (AFC) and Auto Brightness/Contrast Control (ABCC) functions More accurate and faster AFC and ABCC algorithms enable optimized image observation and higher throughput ??.Application Data from High Vacuum Mode3 4Accelerating Voltage: 5kV, Backscattered Electron (BSE) ImageMagnification: x30,000, Resolution:10nmBefore Auto Focus After Auto Focus8sec10sec4sec6sec reduced3secABCC AFCAFCABCCSample : ZnOAccelerating Voltage : 5kV, Magnification : x30,000Without metal coatingSample : Titanium Oxide ParticleAccelerating Voltage :3kV,Magnification : x15,000, Without metal coatingSample : Courtesy of Prof.Masato Kakihara,Tohoku UniversitySample : Tablet (Confectionery)Accelerating Voltage : 1.5kV,Magnification : x10,000Without metal coatingSample?SolderAccelerating Voltage?5kVMagnification?x10,000Pressure?High VacuumSecondary Electron (SE) ImageWithout metal coatingSample?SolderAccelerating Voltage?5kVMagnification?x10,000Pressure?High VacuumBackscattered Electron (BSE) ImageWithout metal coatingSample?SolderAccelerating Voltage?5kVMagnification?x10,000Pressure?High VacuumMixed Image (SE Image + BSE Image)Without metal coatingSample : Gold-Isocyanide ComplexAccelerating Voltage : 0.8kV,Magnification : x2,100Without metal coatingSample : Al2O3/Fe2O3 sintered body,?Accelerating Voltage : 3.0kV,Magnification : x20,000, Without metal coatingSample : Courtesy of Prof.Minoru Fukuhara,Okayama University of Science11sec reduced??Former System??5sec reducedHigh Resolution at Low Accelerating VoltageMaximizing Signal IntensityImproved Signal ProcessingImproved Processing Speed and AccuracyThe electron optics design yields unmatched imaging performance. The SU3500 employs a new low-aberration objective lens and improved bias function that provides higher emission current at low kV. These improvement gains allow the SU3500 to achieve 7nm SE image resolution at 3kV accelerating voltage and 10nm BSE image resolution at 5kV accelerating voltage.Accelerating Voltage: 3kV, Secondary Electron (SE) ImageMagnification: x40,000, Resolution:7nmSample: Gold particles on CarbonNovel and Innovative Electron Optics and Image Signal ProcessingUnparalleled Image Quality?1 Comparison S-3400N?2 AFC and ABCC throughput may vary depending on many factors.Sample : ????????, Accelerating Voltage : 2kV,Magnification : x17,000,With OSO4 coating Sample : Courtesy of Prof. Yoshiaki Kawamura, Aichigakuin UniversityHelicobacter bilis5 6Image observation and analysis without traditional specimen preparation techniquesObservation at Low VacuumThe SU3500 incorporates variable pressure capability. The newly designed vacuum system enables low vacuum settings within the range of 6-650Pa. The vacuum condition is actively monitored in real-time for maintaining stable vacuum levels at the selected pressure.Observation without metal coating :Clearer material contrast of Ti (arrowed) at low vacuum mode.Application Data from Low Vacuum ModeObservation with metal coating :Material contrast of Ti (arrowed) is reduced by metal coating.Low Vacuum mode without metal coating :Less specimen surface charging.High Vacuum mode without metal coating : Image distortion due to surface charging.EDS Spectrums without metal coating :Spectrums of Zr can be clearly identified.by Oxford EDX AZtec(Option)EDS Spectrums with metal coating : Spectrums of Zr and Pt (coating material) are overlapped.Utilizing a low vacuum environment can allow observation of water or oil based specimens in a natural state. The positively charged ions originated from the residual gas molecules generated by electron beam neutralize negatively charged electrons impinged on the specimen surface. Low vacuum observation eliminates traditional sample preparation requirements such as specimen dehydration or metal coating.Operating theory of Low Vacuum modeExternal view of UltraVariable-Pressure DetectorAccelerating Voltage ?15kVSample : Copper Mineral, Vacuum : 70Pa,Magnification : x4,500, Detector: BSE DetectorWithout metal coatingAccelerating Voltage ? 5kVSample : Copper Mineral, Vacuum : 30Pa,Magnification : x4,500, Detector: BSE DetectorWithout metal coatingSample : Filler (Glass fibers) in ResinAccelerating Voltage : 5kV, Vacuum: 50Pa,Magnification : x1,000,Detector: BSE DetectorWithout metal coatingSample : Polyvinyl AlcoholAccelerating Voltage : 3kV, Vacuum: 60Pa,Magnification : x1,000, Detector: BSE DetectorWithout metal coatingSample : ABS ResinAccelerating Voltage : 10kV, Vacuum 30Pa,Magnification : x20,000, Detector: BSE DetectorWith OsO4 staining Sample : Polyvinyl AlcoholAccelerating Voltage : 3kV, Vacuum: 60Pa,Magnification: x1,000,?Detector: Ultra Variable-Pressure Detector, Without metal coatingSample : Cross section of Printed Circuit BoardAccelerating Voltage : 5kV, Vacuum : 30Pa,Magnification: x150, Detector : BSE DetectorWithout metal coatingTreated by the Hitachi Ion milling system IM4000Sample : Cross section of Printed Circuit BoardAccelerating Voltage : 3kV, Vacuum : 20Pa,Magnification : x5,000, Detector: BSE DetectorWithout metal coatingTreated by the Hitachi Ion milling system IM4000Sample : SphaeromatidaeAccelerating Voltage : 15kV, Vacuum : 50Pa,Magnification : x65, Detector: BSE DetectorWithout metal coatingAccelerating Voltage ?15kV Accelerating Voltage ?5kV Accelerating Voltage ?1.5kVResidual gas molecules??+-BSE Detector????++----- ----Sample : Photocatalytic Fiber Sample : Zirconium SulfideSample : VaristorVacuum : 30PaLow Vacuum Mode Advantages The new, innovative Ultra Variable-Pressure Detector (UVD) (Optional)Non-conductivespecimenNegative ion originated from residual gas moleculePositive ion originated from residual gas moleculeNegative ion on the surfaceCharge less observation without metal coating of non-conductive specimen possible.Metal coating, such as Au or Pd absorbs SE, BSE, and X-ray signals from the specimen and weaken SEM detectable signals.No peak overlapping X-ray analysis is possible without metal coating.The new Ultra Variable-Pressure Detector (patent pending) is a highly sensitive detector for low vacuum mode, which is optimized for imaging surface details at low acceleration voltages. The UVD image provides compositional contrast information at higher acceleration voltage - as shown below. The combination of the UV and BSE detectors simultaneously provides detailed, complimentary compositional and surface information.LoLLLLoooLoLoooLowwwwwww VaVVVaVVVaaVaVacuccuucuuuucucucuuuuuumumuuum MMMMM MododeeLow Vacuum Mode7 8Easy operation and increased throughput Improved Visibility and Operation with a 24.1 inch Wide ScreenThe wide screen allows to display single large size image or multiple images for multi-functional purposes. Multiple live signals for the same view can be mixed and displayed as one combined live image.This allows effective image analysis with multiple signals in one image; for example, the secondary electron (SE) providing surface rich information and the back scattered electron (BSE) signal for compositional information. (outlined picture in red: SE and BSE mixed image)Mixing SignalsTwo selectable magnification display available based on either the conventional Polaroid Size (127mm x 95mm) or the image size on the LCD screen.User customizable icon settingTwo-way selectable Magnification DisplayThe icon selection and setting can be customizeddepending on needs and frequency of use. Thiswill help improve work efficiency.Ease of UseSingle image, dual image, quadruple image, and full screen image display layouts are available. This allows multi-signal image observation simultaneously and real time image comparison.Versatile Image Display FunctionSingle image display (800 x 600 pixels) Good for finding observation target or focus adjustment.Max. Pixel Size 1,920 x 1,200Real time multi-signal processing and displayDual image display (800 x 600 pixels x 2)Two different signal of live images are displayed simultaneously. This allows effective image comparison like the SE/UVD for surface info or BSE compositional image.Quadruple image (640 x 480 pixels x 4) Real time 4 different image display for effective multiple image comparison, for example, SE image, BSE compositional image, BSE topographic image, and BSE 3D image.Full screen image (1,280 x 960 pixels)Real time high resolution & large sized image display suitable for observing the image with multiple users.Unique live signals can be mixed and displayed as a combined live imageTwo-way Selectable Mag. DisplayInInnInIntttttIntuitive Operation9 10Easy operation and increased throughput InInnInIntttttIntuitive OperationSix commonly used operating condition sets are pre-registered on the SU3500 by Hitachi. This will allow any users to find the basic observation condition quickly. Also the user defined condition set can be registered and retrieved for quick start.Easy Observation Condition SettingUser maintenance can be done easily by following the video instructions.Video Instruction“Auto Start” executes electron beam irradiation, adjustment of focus, brightness, and contrast automatically at the selected accelerating voltage.Auto Start functionThe Operation Panel integrates all the necessary controls (scan speed, auto brightness and contrast, focus, magnification, and image capture and save) into one convenient location on the SEM console. Operation Panel is a standard componentSEM High-Vacc(? ×10K) SEM High-Vacc(? ×10K)Guide screen for focus adjustment Guide screen for astigmatism correctionAlignmentThe Easy Flow Wizard guide assists at each operation step that allows even an occasional user to use the SEM effortlessly.Acc.Voltage Split pull-down“Video Maintenance Wizard Guide” provides accurate and easy to understand maintenance instruction “Operation Guide” enables inexperienced users to select the optimum condition easilyFilament exchangeCondenser lens aperture exchange11 12New analytical chamber and automated stage functionsX-Y, Tilting(T), Rotation(R), Height(Z) Control1X-Y Step Move control2Stage Control RISM and ZOOM FunctionCentering the Area of Interest“Image Navigation Function”Locating area of interest “Stage Navigation Function”Tracking Stage PositionsThe “Stage Navigation Function” keeps track of X/Y stage coordinates and displays the current stage coordinates and previously visited coordinates. “Stage Navigation Function” allows the user to revisit previously visited positions quickly and easily.The area of interest is moved to the screen center by clicking the area of interest.The area of interest enclosed by mouse dragging is automatically centered and enlarged on the live image.RISM (Rapid Image Shift Mode):ZOOM: Click the area of interest to move it to the screen centerDrag the area of interest to move it to any screen positionDragged area is moved to the screen center and enlargedReturning the stage to the previously image captured positionsRetrieving Stage PositionsThe last 100 images captured are automatically saved with the stage coordinates. The stage is able to move to the coordinates previously visited once the image of interest is selected. (ex. The image outlined in yellow from the images outlined in red is selected to move the stage to the previous coordinates)Eucentric 5-Axis Motorized StageBy track ball (joystick as an option), a mouse control or numerical data input.Stage movement by specified step distance at each click. Effective for repeated pattern observation.3 Z focus linkThe image is kept in focus while Z position is changed.4 Programmed Eucentric Tilt /RotationThe field of view is kept in screen without losing the view from the screen while the stage is tilted/rotated.5 Graphic display of observation pointThe relative position of the specimen and the objective lens is graphically displayed.“Image Navigation Function” enables the operator to find the observation target quickly by navigating the stage based on low magnification optical scope or digital camera image. The available file formats are BMP, JPEG, and TIFF.MSSSSMulti-Functional Specimen Stage13 14Wide range of specimen holders to support a variety of applications and specimens (optional)Multi-specimen holdersMulti-specimen holders can accommodate multiple specimens at a time. The holders are supported by the stage control GUI. The specimen stub selected by the index number on the GUI screen moves to the beam center for imaging.Special holders Specimen holderVariety of Specimen Holders/ Evacuation system Specifications Resolution SE Resolution BSE Magnification ?Detector and analytical toolColumn unitDisplay unitRotary pumpAir compressorWeight740?W?×1,000?D?×1,550?H?mm, 450kg?41,000?W?×1,000?D?×730?H?mm, 153kg?5526?W?×225?D?×306?H?mm, 28kg?6415?W?×210?D?×515?H?mm, 18kg?6200?W?×180?D?×160?H?mm, 40kgRoom temperatureHumidityPower supplyPower cableGroundingSpecifications Optional accessoriesDimensions & weight Installation requirement Typical installation room layout Items DescriptionItems DescriptionItems DescriptionAccelerating voltage Variable pressure range Image shift Maximum specimen size Specimen stage X Y Z R T Observation area Maximum height Stage controlElectron optics Electron gun Objective aperture Gun bias Analytical positionDisplay unit OS Control Monitor Auto alignment Filing formatEvacuation system Operation Turbo molecular pump Rotary pump Protection 3001,0002,400 or greater500 or greater400or greater2,700 or greater500or greater 1,7407001,0005264152252101,000740Supply cable?10m?Power supplySingle phase AC 100,115,200,220 or 240V(±10%), 2.0kVADoorway 1,050 or greaterUnit?mm?Column unit? ?Display unit?Rotary pumpAircompressor Weight????????????????????????????????????????????????3.0nm at 30kV?High vacuum mode?7.0nm at 3kV?High vacuum mode?4.0nm at 30kV?Variable pressure mode?10.0nm at 5kV?High vacuum mode?×5? ×300,000?on photo ?1?×7 ??×800,000?on display ?2?0.3? 30kV6? 650Pa±50µ??WD=10mm?200mm in diameter0? 100mm0? 50mm5? 65mm360°?20? 90°130mm in diameter?with rotation?80mm?WD=10mm?Computer eucentric 5-axis motorizationPre-centered cartridge filament5-position, click stop objective apertureAuto bias with variablebias controlEverhart Thornley secondary electron detectorHigh sensitivity semiconductor BSE detector10mm?T.O.A=35°?Windows®??3?subject to change without notice?Mouse, Keyboard, Rotary knob, Track-ball 24.1inch LCD or equivalent ?subject to change without notice?Auto beam alignmentBMP,??TIFF,??JPEGFull screen display ?1,280×960 pixels?Small screen display ?800×600 pixels?Dual screen display ?800×600 pixels?Quad screen display ?640×480 pixels?Signal mixingFully automated vacuum sequence210L /s ×1135L /min?162L/min with 60Hz? ×1Power failure and vacuum failureRaster rotationDynamic focus/tilt compensationFree layout print function, alphanumeric functionOperated navigationVideo maintenanceEasy measurement?1 : at 127mm×95mm?4"×5"Picture size? ?2 : at 345mm×259mm?1,280×960 pixels? ?3 : Windows® is a resistered trademark of U.S.Microsoft Corp. in U.S.A. and other countries.?4 : Weight does not include supply cable and connector. ?5 : Weight includes PC. ?6 : Reference only. Ultra Variable pressure Detector ?UVD?Energy dispersive X-ray spectorometer (EDX) made by third party vendorElectro backscattered diffraction analyzer (EBSD) made by third party vendorSpecimen stage and holderMulti-specimen holderSpecimen holders for resin embedded specimensSpecimen holders for EBSPSoftwareHi-Mouse?One keyboad, one mouse?External communication interface, DBC15?30°C70%RH or lessSingle phase AC 100,115,200,220 or 240V(±10%), 2.0kVA10meters long with M5 crimp-type terminal100O or less ?????????????????640×480 pixels, 1,280×960 pixels, 2,560×1,920 pixels, 5,120×3,840 pixelsAuto focus, auto stigmation/ focus, Auto brightness & contrastAuto filament saturation, Auto startAuxiliary functions Automatic vacuum protection sequence for unexpected power failurePneumatic valves protect the system and maintain vacuum integrity in the event of a power interruption. This helps maintain the specimen chamber environment and minimize downtime. The SU3500 only requires one rotary/scroll pump?. 12.7mm dia. stub x 18 pcsSpecimen holders for resin embedded specimensSpecimen holder for EBSP?Comparison S-3000NRotary pump and Air compressor are not included with main unit depending on its destination. ?6?6