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- Trimethylboron Datasheet
Trimethylboron Datasheet
A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition. Trimethylboron is usually shipped as a pure liquefied gas, or in mixtures with argon, helium, hydrogen, nitrogen or silane. Also available enriched in B-10 or B-11 as a special order.
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