UHP (Ultra High Purity) Solar - Brochure

Evans DM Series CAr Purge Tools E vans Components provides an economical, reliable and more compact solution to purge gas delivery for high-purity welding and testing in semiconductor applications. The convenient to use Evans Purge Tool, and Purge Station, directly replaces costly multi-component arrays with an exclusive “Integrated Manifold” design. All components are integrated into a single compact, lightweight unit which eliminates assembly time, reduces potential hazing and discoloration of weld zones, and improves reliability. All Evans Purge Tools and Purge Stations are cleaned for oxygen service and packaged in a clean room environment. Lower cost than conventional stainless assemblies. Fewer connections and welds give unmatched leak integrity. Superior purgeability and improved dry-down characteristics. Features COMPONENTS, INC EVANS ® Important Features and Specifications Compact/Lightweight 100% helium leak tested, 1x10-9 Each flowmeter rated to a maximum flow rate of 110 scfh/52 slpm Assembly is rated to 225 psig 10 Ra electro polished stainless fittings Guaranteed dry-down to less than 10 ppb DM SERIES PURGE TOOL - PART NUMBER DESCRIPTION DM - UHP - FM5 - G - V - X(OPTIONS) Class 100 Cleaning and Packaging 5 Bank Flowmeter G - UHP Gauge X - No Gauge V - 1/2” Diaphragm Valve X - No Diaphragm Valve R - UHP Regulator F - 0.01um Filter, SS Element (75 slpm) At each Flowmeter Outlet Connection X - No Options Series Evans Components, Inc. 7606 Bridgeport Road Portland, Oregon 97224 Phone: 971-249-1600 Fax: 971-249-1601 Web Site: www.evanscomponents.com EVANS COMPONENTS, INC ® NOTE: Product availability and specifications contained herein are subject to change without notice. Consult local distributor or factory for potential revisions. 07/08 Drawings & Specifications CAr PURGE STATION PART NUMBER: DM-UHP-8VF5-2