V3000 V3 Datasheet

The V3000 Macro-Scope Defect Review System is a powerful, easy-to-use, dual-cassette, all-in-one wafer inspection system that is able to handle both macro and micro inspection of wafers. The system enables the operator to easily spot defects during macro inspection and then, with a few simple key strokes, clicks of the buttons, or touches on the screen, seamlessly move the substrate to the microscope for detailed inspections. It combines the capabilities of macro inspection and microscope inspection in one powerful integrated system. The V3000 offers great performance, reliability, energy efficiency, and low cost of ownership.