3M
3M - Model P7100 -Sub Pad CMP Fixed Abrasive
From3M
Outstanding planarization, Exceptional within-die range, Low defects, Stable repeatable process, Wide process window, Reduced step height. The 3M Fixed Abrasive P7100 sub pad provides improved process performance and stability matched to the extended life of 3M`s fixed abrasive rolls. This enables improved process performance, minimized consumable changes and reduced tool downtime.
