CLEANSORB - Model FABLINE FX -Advanced Exhaust Gas Purification System
The CLEANSORB FABLINE FX is an advanced exhaust gas purification system designed to offer reliable and efficient gas treatment solutions. It features a two-column model with a compact footprint that facilitates continuous operation without interruptions. The system's status and operating modes can be easily managed and monitored through an intuitive touchscreen interface. The FABLINE FX incorporates fully automated processes for gas purging and leak testing of its absorber column. Its chemisorber media ensure safety and performance, making it suitable for a variety of specific process applications, such as plasma etching, chemical vapor deposition (CVD), atomic layer deposition (ALD), ion implantation, and photovoltaic production. With its enhanced capabilities, the FABLINE FX upholds environmental protection as a core priority of CS CLEAN SOLUTIONS' product offerings.
CLEANSORB FABLINE FX exhaust gas purification is the latest version of the series, whose reliability has already been proven in several thousand CS CLEAN SOLUTIONS installations worldwide. An additional backup column of the FABLINE FX product offers the advantage of an uninterrupted two-column model, but with a smaller footprint.
Operating modes and system status are conveniently visualized and selected via a touchscreen display. Gas purging and leak testing of the absorber column are fully automated during exhaust gas purification.
Thanks to the safety and performance of all CLEANSORB chemisorber media, FABLINE FX is the model of choice for your specific process application, including:
Plasma etching , CVD , ALD , ion implantation and photovoltaics.
- Passive operating principle, requires neither electricity nor heating, fuel or water
- Made from corrosion-resistant 316L stainless steel and high-quality components
- State-of-the-art remote connection via USB, Ethernet, FTP, NTP, OPC.
- Wide range of configurations and options, including integrated blower
- Available as SEMI-S2 compliant version with redundant safety features