Filmetrics - KLA Corporation

FilmetricsAffordable 3D Profilometer

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Get an optical profilometer for less than half the price of an AFM or 3D stylus profilometer! The Profilm3D® uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001µm. The newest generation of the Profilm3D offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.

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