NANOCHEM - Model A-300I -Arsine and Phosphine Purifier
NANOCHEM A-300I series purifiers offer a new, patented breakthrough technology alternative to the purification of 100% AsH3 and PH3 used in the III-V Compound Semiconductor Epitaxy Processes, with a `drop-in` replacement design. Gas contaminants, especially moisture and oxygen-containing species, adversely affect process quality and reduce yields. In AsH3 and PH3, moisture is known to increase with cylinder use. NANOCHEM A-300I purifiers provide protection from such moisture surges from source AsH3 and PH3 gases, and from system upsets, such as leaks in the process line and cylinder changes.
- Female inlet and male outlet are 1/4"VCR -compatible face seal fittings
- AsH3 Model: A-300I-ASXTM (Part # S1060-0414-001)
- PH3 Model: A-300I-PHXTM (Part # S1060-0414-002)
- "Drop-In" replacement cross reference number for Mykrolis (Millipore) Part #: WPGV-203-TH
- Direct purification for 100% AsH3 and PH3 gas used in ultra-high purity applications: point-of-use (most recommended), valve manifold boxes and gas cabinets
- Critical application: GaAs MOCVD - Proven in the field for the manufacture of high brightness LEDs and HBTs using high-purity AsH3 and PH3
- No external power source required
- Easy to install and operate
- Does not require heating or cooling
- Mounting bracket included
- Design uses Inlet / outlet springless diaphragm valves
- Uses new, patented, superactivated inorganic purification media ASXTM and PHXTM
- "Drop-In" replacement for competitor’s hydride purifiers
- Ultra-high purification of AsH3 and PH3
- ASXTM and PHXTM media performance specifications:
- < 1 ppb H2O in inert gas (APIMS LDL)
- < 75 ppb H2O in AsH3(MAH-2 LDL)
- < 45 ppb H2O in PH3(FTIR LDL)
- < 300 ppb CO2in inert gas (PHXTM, GC-DID LDL)
- Expect to remove oxyacids: HxAsyOz & HxPyOz
- 0.003 µm Pall
- Teflon PTFE particle filter with 99.9999999% retention
- Recommended flows: up to 15 slpm (0.9 NM3/hr)
- Maximum feed AsH3/PH3 pressure – 60 psig (0.51 MPa)
- Maximum operating temperature: 40°C
- Internal surface finish: < 10 µin Ra
- All metal parts: Type 316L stainless steel, Elgiloy or Nickel 200
- ASXTM and PHXTM media are also available for NANOCHEM Models L-60 and L-300
LDL Lower Detection Limit by State-of-the-Art Analytical Instrumentation
APIMS Atmospheric Pressure Ionization Mass Spectrometry
FTIR Fourier Transform Infrared Spectrometry
GC-DID Gas Chromatography with Discharge Ionization Detector
MAH-2 Shimadzu Moisture Analyzer, Model MAH-2