Applied Energy Systems, Inc.
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SEMI-GAS Decaturion - Model D-ATP -AT-Plus Wall Mount System
SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
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DESIGN STANDARDS
- Conforms tSEMI S2 Standards
- Conforms tUniform Building and Fire Codes
- Upholds Sample Validation Testing Standards
- Helium Leak Tested tlxlO`9 atm-cmVsec
FEATURES
- Safely Dispenses Hazardous Gases
- Compact. Modular Gas Delivery Manifold for Wall or Cabinet Mounting
- Ultra High Purity Process Fluid Components
- Fully Retrofittable tExisting AT-Plus Installations Manual, Semi Automatic, or Fully Automatic
- Manifold Operation Ultra High Purity Orbitaliy Welded and VCR Construction
- Conical Filter Gasket
ENGINEERING DATA
- Dimensions: 10T X 20"W X 12"D
OPTIONS
- Dual Stage Tied Diaphragm Regulator
- Excess Flow Switch
- Transducer or Switch Based Pressure Monitoring
- Retrofittable Purge. Vent and AutSwitch Piping
- Purge Gas Bleed, Vacuum Access Valve Available