Swagelok - Model ALD3 and ALD6 UHP -Atomic Layer Deposition (ALD) Valves

• Ultrahigh cycle life with high-speed actuation
• C_v range from 0.27 to 1.7
• Full immersibility up to 392°F (200°C) with thermal actuators
• Suitability for UHP applications with standard 316L VIM-VAR stainless steel body
• Modular surface-mount, tube butt weld, and VCR^® end connections
• Electronic or optical actuator position-sensing option

ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

• Working Pressure Vacuum to 145 psig (10.0 bar)
• Burst Pressure >3200 psig (220 bar)
• Actuation Pressure 50 to 90 psig (3.5 to 6.2 bar)
• Temperature 32° to 392°F (0° to 200°C)
• Flow Coefficient (Cv) 0.27 or 0.62
• Body Materials 316L VIM-VAR stainless steel
• Diaphragm Material Cobalt-based superalloy
• End Connections
• Type (Size) Female VCR® face seal fitting (1/4 in. to 1/2 in.)
• Male VCR face seal fitting (1/4 in. to 1/2 in.)
• Modular surface mount high-flow C-seal (1.125 in. to 1.5 in.)