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Fitok - Model ALD Series -Atomic Layer Deposition Diaphragm Valve
FromFitok Group
Atomic Layer Deposition (ALD) is a method of applying thin films to various substrates with atomic scale precision. As chip node dimensions are continuously shrinking, traditional deposition techniques have reached their limits. Depositing ultra-thin layer at the nanoscale requires Atomic Layer Deposition (ALD) technology, which allows materials to be deposited one atomic layer at a time. ALD series diaphragm valves are used to deliver precise doses of gases during the deposition process used to create semiconductor chips.
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- Ultra long cycle life
- No dead space in the flow path
- High Cv consistency and stability
- Quick response to offer a total opening / closing response time of less than 15 ms
- Standard and thermal types optional, the thermal type has a working temperature up to 392°F (200°C)
- For the valve fitted with a solenoid valve, the solenoid valve is circularly rotatable along the actuator for easy position adjustment
