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Brooks PuroMaxx - Model 600 -Automatic RSP Cleaner
The PuroMaxx 600 fully automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned. The PuroMaxx 600 is the perfect solution for the automatic cleaning of RSP150 or RSP200.
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- Fully automated cleaning tool for RSP150 or RSP200 carriers with OHT interface.
- A fully automated front end handling unit paired with two cleaners working in parallel and buffer stations make this tool the highest throughput cleaner in the industry.
- Class 1 mini-environment & ESD.
- SEMI standard-compliant SECS/GEM interface.