Axetris - Model OEM -Mass Flow Controller

The Axetris mass flow controller OEM-module (MFC) with platinum-based MEMS chip technology guarantees excellent stability and repeatability over the whole flow range. Due to their unmatched dynamic range and multi-gas capability, the MFC modules can replace several conventional mass flow controllers with a single unit. Target gases for this module are N2, Air, O2, CO2, Ar, He, and H2. The compact and robust design makes it also an ideal choice for portable applications like for example leak testing devices or handheld systems.