Bowman - Model M Series-XRF -Coating Thickness Measurement Systems
The M Series is the ultimate in high performance plating thickness measurements for the smallest features. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to 15μm FWHM. To measure features on that scale, a 150x magnification camera with an even higher digital zoom is included. The field of view becomes more restricted with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.
The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.
The standard configuration includes the 15μm optics, and a high resolution SDD detector to process the higher count rates. A programmable X-Y sample stage is also standard. The optics system has a close focal distance, so samples measured with the M Series must be flat.
Now available with extended stage option
- Very small parts/features such as those found in semiconductors, connectors, or PCBs
- Requirement to test many samples or locations per new lot of material
- Very thin coatings (<100nm)
- Very short measurement times (1-5 seconds)
- Guaranteed to meet IPC-4552A, 4553A, 4554 and 4556
- ASTM B568, DIN 50987 and ISO 3497
- X-ray excitation: 50 W Mo target Flex-Beam Capillary Optics @15 FWHM
- Detector: Silicon drifted detector with 135eV resolution
- Number of analysis
- layers and elements: 5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
- Filters/Collimators: 4 primary filters
- Focal Depths: Fixed at 0.05″ (1.27mm)
- Digital Pulse Processing: 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
- Computer: Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
- Camera optics: 1/4″ (6mm) CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 381mm (15″) screen
- Video Magnification: 250X: with Dual Camera 45X: with Single Camera on 15″ screen
- Power Supply: 150W, 100-240 volts, with frequency range of 47Hz to 63Hz
- Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
- Weight: 70kg
- Programmable XY: Table size: 431 mm (17″) x 406mm (16″) | Travel: 165mm (6.5″) x 165mm (6.5″) high precision
- Now available with extended stage option
- Internal Dimensions: Height: 137mm (5.4″), Width: 310mm (12″), Depth: 340mm (13″)
- External Dimensions: Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″)