Expedius+ Environmental Equipment & Supplies

1 equipment items found

Expedius+ - Model UW300Z - Auto Wet Station

Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN

The EXPEDIUS™ + is a 300mm batch clean system which is the advanced model of the highly reliable UW300Z EXPEDIUS™, a concept endorsed by many semiconductor manufacturers. The EXPEDIUS™ + is designed for 45nm and beyond technology node and has improved upon its predecessor in both performance and productivity. The configuration of the chemical treatment tanks, pure water rinse ...

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