Guardianpro S Environmental Equipment & Supplies

1 equipment items found

GuardianPro-S - Fully Automated Reticle Management System

Manufactured by:Brooks Automation based inChelmsford, MASSACHUSETTS (USA)

The GuardianPro-S™ family provides a fully automated reticle management system with a stocker capacity of up to 2900 reticles on a minimal footprint. The reticles are safely stored in Tec-Cell® modules, ensuring an ISO class 1 microenvironment with xCDA purge. The GuardianPro-S family supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods ...

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