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Daihen Environmental Equipment & Supplies
5 equipment items found
Manufactured by:DAIHEN Advanced Component, Inc based inSunnyvale, CALIFORNIA (USA)
2.45GHz/1kW~5kW Standard type of small size and high efficiency; High-performance type compatible with 2 level pulse. Features; We contribute to the generation of stable high density plasma by high precision output with good reproducibility. Wide lineup from 1kW to 5kW. Supports full support including matching ...
Manufactured by:DAIHEN Advanced Component, Inc based inSunnyvale, CALIFORNIA (USA)
400kHz/500W~20kW High frequency power supply with pulse output function; Equipped with pulse function. Supports full support including matching device. High power models are also available to support high power ...
Manufactured by:DAIHEN Advanced Component, Inc based inSunnyvale, CALIFORNIA (USA)
Standard type of small size and high efficiency; High-performance type compatible with 2 level pulse. Features; Large capacity lineup from 15kW to 30kW. Supports full support including matching device. Contribution to system cost reduction by the built-in variable frequency ...
Manufactured by:DAIHEN Advanced Component, Inc based inSunnyvale, CALIFORNIA (USA)
High payload model for wafers up to 300mm Standard model which is available for high payload and extensive ...
Manufactured by:DAIHEN Advanced Component, Inc based inSunnyvale, CALIFORNIA (USA)
Edge grip type that does not touch the wafer backside and Compatible with quartz ...