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Voltaix Environmental Equipment & Supplies
6 equipment items found
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A flammable, toxic, colorless, non-corrosive, pyrophoric liquid. Trisilane is used for deposition of poly silicon and silicon-based alloys. It is shipped as a liquefied gas, with an inert “pad” of about 5 ...
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A flammable, toxic, colorless gas used primarily as a p-type dopant for the deposition of epitaxial and amorphous silicon and as a component in the CVD of BPSG (borate-phosphate-silicate-glass) ...
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A flammable, toxic, colorless gas used primarily as a source for the plasma assisted CVD of gettering coatings deposited on internal surfaces of Tokomak reactors. Also used as a substitute for diborane in deposition technologies for which the greater chemical stability of deuterated diborane presents a significant ...
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A flammable, toxic, colorless gas used for the deposition of epitaxial and amorphous silicon - germanium alloys, and as a component for PECVD of (Si,Ge)O2 films with controllable refractive index for photonic ...
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A pyrophoric, toxic, colorless gas used primarily for the MOCVD of compound phosphides, the PECVD of phosphate-silicate-borate passivation coatings and the doping of crystalline and amorphous silicon. Phosphine is usually shipped as a liquefied compressed ...
Manufactured by:Voltaix LLC based inBranchburg, NEW JERSEY (USA)
A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition. Trimethylboron is usually shipped as a pure liquefied gas, or in mixtures with argon, helium, hydrogen, nitrogen or silane. Also available enriched in B-10 or B-11 as a special ...
