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Brooks PuroMaxxModel 800 -Fully Automatic 300mm FOUP Cleaner

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The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot. Provides maximum performance by individually cleaning each EUV or RSP 200 part.

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  • High pressure DI-Water spraying with proprietary nozzles combined with IR heating and hot CDA ensures optimal purification of carriers, i.e. removal of particulate matter and AMCs.
  • Vacuum chambers in combination with Nitrogen purgeable load ports ensure that VOCs and moisture are being removed entirely before the carriers are being returned.
  • State of the Art carrier handling technology and optimized recipes allow for throughputs of up to 25 FPH.
  • The tool is the choice for all high end users and is qualified for 3 nm technology.