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PMS - Model CLS-700 T -Corrosive Liquid Particle Sampler
The CLS-700 T corrosive liquid sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing the bubbles into solution. The CLS-700 T corrosive liquid sampler can be integrated into a wet bench for continuous particle monitoring, or located on a cart for increased mobility. When integrated into the wet bench, the sampling system can be started or stopped by the tool, including automatic shutoff during a bath change, to prevent the injection of chemical foam or air into the particle counter. The CLS-700 T corrosive liquid sampler is fully compliant with SEMI CI for particle measurement of process chemicals.
Eliminates bubbles, ensures accurate particle measurement, and streamlines chemical process control with SEMI C1-compliant technology.
- Compression Sampling: Pressurizes the sample to dissolve bubbles, preventing false particle counts in effervescent or gas-containing chemicals.
- Compliance: Fully meets SEMI C1 standards for process chemical particle measurement, ensuring industry-standard accuracy.
- Handles a broad spectrum of corrosive liquids, including sulfuric acid, at temperatures up to 150?°C.
- Supports multiple LiQuilaz® particle counters for size ranges from 0.2?µm to 20?µm, making it adaptable for semiconductor and chemical process monitoring.
- FacilityNet software simplifies online sampling with SPC charts, time plots, and sensor status.
- SamplerSight software supports batch sampling, advanced data storage, retrieval, and report generation.
Versatility
- Supports a wide range of applications and fluids
- Programmable particle-size thresholds
- Designed for easy mobility
- Compression sampling allows instrument to measure most chemicals, including e ervescent ones
- External trigger coordinates sampling with process events
- Measurements can be made directly out of the bath
User-Friendly
- Facility Net process control so ware simplifies online sampling by providing alphanumeric paging, sensor status, tabular and SPC charts, and time plots
- SamplerSight batch sampling so ware facilitates all aspects of data management, including
- sophisticated data storage, retrieval, and report generation
- Designed for quick cleanup when switching from one liquid to another
Cost Reduction
- 100% view volume means quicker process qualification
- Real-time characterization and analysis for immediate response to anomalies means less waste
- Particle level measurement in e ervescent liquids
- Wet process monitoring
- Chemical process control
- Bath monitoring