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Film Sense - Model FS-RT300 -Automated Mapping System
FromFilm Sense LLC
These products combine an FS-1EX Multi-Wavelength Ellipsometer with compact automated mapping stages to provide fast, accurate, and reliable thin film thickness uniformity measurements across a wafer.
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- 6 wavelengths of ellipsometric data (405, 450, 525, 660, 850, 950 nm), with long life LED sources, and no moving parts detector
- Accurate thin film thickness measurements for most transparent thin films from 0 – 5 μm
- Typical thin film thickness repeatability: 0.002 nm
- Integrated focusing probes, standard spot size: 0.8 x 1.9 mm (other spot sizes available)
- USB camera option available
- Motorized Z-stage for sample auto-alignment
- Flexible Scan Pattern Editor
- Contour and 3D plots of measured parameters
- Typical time for thin film thickness wafer map: 2.5 minutes (49 points on a 300 mm diameter wafer)
- Compact footprint: 400×500 mm, 22 kg
- Stage travel: R (linear) 150 mm, resolution: 12 μm Theta (rotation) 360°, resolution: 0.1°