CVD Equipment Corporation

FlexGasCylinder Gas Cabinet

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The FlexGas Gas Cabinet is designed to cover a wide range of cylinder gas delivery applications. In its simplest form, the FlexGas Gas Cabinet houses 1, 2 or 3 gases, and includes a high purity, manual gas panel for each gas. Modular FlexGas™ Panels are available in 1, 2, 3, 4, 5 and 6-Valve designs for Process and Instrumentation Diagrams. Each panel may be tailored to the specific gas and application.

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With the addition of the optional FlexPowr Controller, the FlexGas Cabinet can support a myriad of automated features such as: Auto- Switchover, Excess Flow Sensors, Low Cylinder Pressure Alarms, High Delivery Pressure Alarms, Gas Leak Sensors, Scales and more. The
FlexPowr Controller also supports user-settable alarm inputs and user-settable alarm outputs. EMO slambutton and Exhaust Pressure Sensor are standard with the FlexPower controller option.

Optional FlexPowr Controller

  • Automatic shutdown of process gas panels
  • Up to 10 user-definable alarm inputs
  • Up to 2 user-definable alarm outputs
  • Audible/visible alarm indication
  • EMO button
  • Multilevel password protection

FlexPowr Control Options

  • LOW cylinder pressure switch
  • HI or LOW delivery pressure switch
  • Integrated gas leak detection
  • Integrated UVIR sensor
  • Excess flow sensor

Other Equipment Options

  • Adjustable cylinder shelves
  • Vesta heat control system
  • Outlet splitters
  • Cylinder scales
  • Coax jacket monitor
  • Restrictive flow orifices

Dimensions
1-cyl: 18”W x 72”H x 19”D
2-cyl: 24”W x 72”H x 19”D
3-cyl: 36”W x 72”H x 19”D