Global Standard Technology Co., Ltd. (GST)
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GST - Model Compressor Type -Chiller (Cascade)
System for supply of Working Fluid (Coolant) with consistent temperature in order to maintain low temperature(Chuck temperature : Min -55?) of Wafer Prober Chuck required in the Wafer inspection equipment by cooling the Working Fluid(Coolant) by using Cascade Refrigerant System.
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- Cascade Refrigerant System
- Broad temperature band (Chuck temperature : -55? ~ 150?)
- Can be used for cold processes and hot processes
- Fast cooling time when transitioning between processes
- Increased user convenience (use of Touch Screen)
- Wafer Prober Station
