Global Standard Technology Co., Ltd. (GST)
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GSTModel Compressor Type -Chiller (Cascade)

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System for supply of Working Fluid (Coolant) with consistent temperature in order to maintain low temperature(Chuck temperature : Min -55?) of Wafer Prober Chuck required in the Wafer inspection equipment by cooling the Working Fluid(Coolant) by using Cascade Refrigerant System.

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  • Cascade Refrigerant System
  • Broad temperature band (Chuck temperature : -55? ~ 150?)
  • Can be used for cold processes and hot processes
  • Fast cooling time when transitioning between processes
  • Increased user convenience (use of Touch Screen)

  • Wafer Prober Station