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Helios Nanolab
What puts the Helios NanoLab in a class of its own is its ability to offer the highest imaging, contrast, stability and speed performance together with the largest range of SEM / FIB applications. It ensures best resolution, reproducible metrology and best control of the beam for writing purposes.
The outstanding imaging capabilities of the Helios NanoLab start with its novel FESEM technology, featuring resolution in the sub-nanometer at 15kV and better than 1.5nm at 1kV without beam deceleration. Stunning image quality and contrast are achieved, especially when using the new Helios NanoLab through-the-lens detector. Its innovative design allows for superb imaging in SE and BSE modes over the entire energy range. When imaging is used for metrology purposes, Helios NanoLab introduces a significant breakthrough with its electron beam electrostatic scanning, which allows for pioneering accuracy performance.