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iCAM - High Integrity Precursor Delivery Containers (Bubblers)
FromiCAM Engineering
High integrity precursor delivery containers (Bubblers) for use in Chemical Vapour Deposition (CVD), Metalorganic Chemical Vapour Deposition (MOCVD) and Atomic Layer Deposition (ALD) applications. Containers are an integral part of the supply of high purity chemicals to the electronics industry. Efficient chemical delivery, relies on the design, integrity and performance of the container. Whether it is an existing design, or something completely new and innovative we have the experience and expertise to assist. Supplying containers since 1986, we are the preferred supplier to some of the industries leading chemical manufacturers.
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- Material: Stainless Steel 316L, Hastelloy C
- Certification: DOT 4B
- Helium Leak Test: <2×10-9 atm cc/sec
- Proof Tested: 600 p.s.i. (dependant on rating)
- Finish: Internal – Electro-polished Internally < 0.40 Ra,
- Finish External – Mirror or Brushed Finish.
- Conditioning: RGA <50 ppbv/Nitrogen Back Fill
- Available in different valve/port configurations
- Dip tube adaptations
- Horizontal valve configurations
- Design and fabrication to suit non-standard equipment.
- Valves by all leading manufacturers.
- Thermowell & Sensor mountings, Bypass valves, .
- Reverse Flow.
- Feet option, for improved heat transfer.
- Carrying handles, protection rings, various.
- Design and fabrication to suit non-standard equipment
- Head attachments/valves by all leading manufacturers.
- Thermowell & Sensor mountings, Bypass valves, Variable connection geometry.
- Reverse Flow.
- Feet option, for improved heat transfer.
- Carrying handles, protection rings, various.
- Statistical Process Control (SPC)