Advanced Energy - Model Sekidenko MXE -High-Speed, Non-Contact Optical Temperature Pyrometer with Integrated Reflectance Measurement and Emissivity Compensation

The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well-suited for dynamic processes, including laser-based processing or rapid anneals. The remarkably compact MXE is easily integrated. Its flexible control options support a variety of I/O protocols.

• Improves temperature-measurement accuracy for critical processes
• Enhances repeatability and minimizes variation
• Increases productivity, yield, and throughput
• Increases stability and reliability across multiple chambers and substrate materials

• In-situ, non-contact temperature and emissivity measurement
• High-speed measurement ideal for a variety of applications
• Variety of temperature and reflectance wavelengths
• EtherCAT®, USB, and RS-232 output option

Configurations