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I-Photonics - Model MERIDIAN -Plasma Assisted Reactive Magnetron Sputtering (PARMS) System
The Meridian Vacuum Coating System is designed for high-rate deposition of high-precision optical coatings, catering to various applications that demand precision. This system enables the creation of thin films from diverse materials with exceptional accuracy and quality. It incorporates advanced optical control technology, allowing full automation of processes, which significantly increases the yield and efficiency of production. Utilizing magnetron sputtering within batch coating systems, the Meridian System is adept at delivering coatings suitable for precision applications. Its capabilities make it an indispensable tool for industries where optimal performance of optical coatings is critical.
Vacuum system Meridian is an effective system for high-rate deposition of high-precision optical coatings for a wide range of applications. Meridian system helps to obtain thin films of a variety of materials with high accuracy and excellent quality. Optical control allows to make the processes fully automatic and increase the yield significantly.
- Long throw sputtering configuration enabling particle free coating processes
- Sputter-Up configuration
- High-yield dual-magnetron AC sputtering systems
- Long life RF plasma sources for precleaning and assisting
- On-substrate direct Optical monitoring system I-Photonics OCP
- Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300mm)
- Ultra narrow band pass filters
- Multizone filters
- Steep-edge filters
- Single- and multi-notch filters
- Laser mirrors
- Thin-film polarizers
- Beam splitters
- Sputtering source :HY planar circular magnetrons
- Assisting source :RF plasma source Copra DN250 CCR
- Capacity :Dual rotation planetary holder 10 x 200 mm
- Coating uniformity :<+/-0.2%
- Sputtering materials :Ta2O5, SiO2, HfO2, Al2O3, Nb2O5
- Coating rate :Up to 6 A/sec (material dependent)
- Monitoring system :Automatic optical monitoring system I-Photonics OCP
- Process temperature :<250 oC
- Pumping system :Dry mechanical pump
- Turbomolecular pumps
- Ultimate pressure :8e-4 Pa
- Time to reach start process :45 min
- Installation area (LxWxH) :3790x3560x2450 mm
- Equipment weight :3400 kg